Abstract
Two sets of fluorocarbon films, with varying hydroxide and carboxyl content and varying grain aspect ratio, were produced via hot filament chemical vapor deposition using hexafluoropropylene oxide as the precursor gas. Variable angle spectroscopic ellipsometry of fluorocarbon films was performed to derive film thickness and film optical constants. Increasing the grain aspect ratio decreased the optical dielectric constant.
| Original language | English (US) |
|---|---|
| Pages (from-to) | 2404-2411 |
| Number of pages | 8 |
| Journal | Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films |
| Volume | 18 |
| Issue number | 5 |
| DOIs | |
| State | Published - Sep 2000 |
| Externally published | Yes |
| Event | 47th International Symposium: Vacuum, Thin Films, Surfaces/Interfaces, and Processing - Boston, USA Duration: Oct 2 2000 → Oct 6 2000 |
All Science Journal Classification (ASJC) codes
- Condensed Matter Physics
- Surfaces and Interfaces
- Surfaces, Coatings and Films