Synthesis and characterization of Nb2AlC thin films

T. H. Scabarozi; J. Roche; A. Rosenfeld; S. H. Lim; L. Salamanca-Riba; G. Yong; I. Takeuchi; M. W. Barsoum; J. D. Hettinger; S. E. Lofland

doi:10.1016/j.tsf.2008.12.047

Synthesis and characterization of Nb₂AlC thin films

T. H. Scabarozi, J. Roche, A. Rosenfeld, S. H. Lim, L. Salamanca-Riba, G. Yong, I. Takeuchi, M. W. Barsoum, J. D. Hettinger, S. E. Lofland

Physics

Research output: Contribution to journal › Article › peer-review

53 Scopus citations

Abstract

We report on the synthesis and characterization of epitaxial c-axis oriented Nb₂AlC thin films deposited on c-axis sapphire (Al₂O₃) substrates by magnetron sputtering. Selected area electron diffraction reveal that independent of substrate temperature or film stoichiometry, there is the growth of a secondary phase not found in bulk, Nb₅Al₃C_x with a- and c-axis lattice constants of 7.746 Å and 5.246 Å, respectively. Scanning electron micrographs reveal large surface features, many with hexagonal shape and faceted texture. Atomic force microscopy topographical measurements indicate a surface roughness of approximately 15% of the total film thickness. Electrical transport measurements show typical metal-like conduction with a room temperature resistivity of ≈ 0.9 μΩ-m and a residual resistivity ratio of 2.5. A superconducting transition was found at ≈ 440 mK.

Original language	English (US)
Pages (from-to)	2920-2923
Number of pages	4
Journal	Thin Solid Films
Volume	517
Issue number	9
DOIs	https://doi.org/10.1016/j.tsf.2008.12.047
State	Published - Mar 2 2009

All Science Journal Classification (ASJC) codes

Electronic, Optical and Magnetic Materials
Surfaces and Interfaces
Surfaces, Coatings and Films
Metals and Alloys
Materials Chemistry

Access to Document

10.1016/j.tsf.2008.12.047

Cite this

@article{64c588f79f9e485ab3263fbe3041f79b,

title = "Synthesis and characterization of Nb2AlC thin films",

abstract = "We report on the synthesis and characterization of epitaxial c-axis oriented Nb2AlC thin films deposited on c-axis sapphire (Al2O3) substrates by magnetron sputtering. Selected area electron diffraction reveal that independent of substrate temperature or film stoichiometry, there is the growth of a secondary phase not found in bulk, Nb5Al3Cx with a- and c-axis lattice constants of 7.746 {\AA} and 5.246 {\AA}, respectively. Scanning electron micrographs reveal large surface features, many with hexagonal shape and faceted texture. Atomic force microscopy topographical measurements indicate a surface roughness of approximately 15% of the total film thickness. Electrical transport measurements show typical metal-like conduction with a room temperature resistivity of ≈ 0.9 μΩ-m and a residual resistivity ratio of 2.5. A superconducting transition was found at ≈ 440 mK.",

author = "Scabarozi, {T. H.} and J. Roche and A. Rosenfeld and Lim, {S. H.} and L. Salamanca-Riba and G. Yong and I. Takeuchi and Barsoum, {M. W.} and Hettinger, {J. D.} and Lofland, {S. E.}",

note = "Funding Information: This work was funded by the National Science Foundation grants DMR-0503711 and MRSEC 0520471.",

year = "2009",

month = mar,

day = "2",

doi = "10.1016/j.tsf.2008.12.047",

language = "English (US)",

volume = "517",

pages = "2920--2923",

journal = "Thin Solid Films",

issn = "0040-6090",

publisher = "Elsevier B.V.",

number = "9",

}

TY - JOUR

T1 - Synthesis and characterization of Nb2AlC thin films

AU - Scabarozi, T. H.

AU - Roche, J.

AU - Rosenfeld, A.

AU - Lim, S. H.

AU - Salamanca-Riba, L.

AU - Yong, G.

AU - Takeuchi, I.

AU - Barsoum, M. W.

AU - Hettinger, J. D.

AU - Lofland, S. E.

N1 - Funding Information: This work was funded by the National Science Foundation grants DMR-0503711 and MRSEC 0520471.

PY - 2009/3/2

Y1 - 2009/3/2

N2 - We report on the synthesis and characterization of epitaxial c-axis oriented Nb2AlC thin films deposited on c-axis sapphire (Al2O3) substrates by magnetron sputtering. Selected area electron diffraction reveal that independent of substrate temperature or film stoichiometry, there is the growth of a secondary phase not found in bulk, Nb5Al3Cx with a- and c-axis lattice constants of 7.746 Å and 5.246 Å, respectively. Scanning electron micrographs reveal large surface features, many with hexagonal shape and faceted texture. Atomic force microscopy topographical measurements indicate a surface roughness of approximately 15% of the total film thickness. Electrical transport measurements show typical metal-like conduction with a room temperature resistivity of ≈ 0.9 μΩ-m and a residual resistivity ratio of 2.5. A superconducting transition was found at ≈ 440 mK.

AB - We report on the synthesis and characterization of epitaxial c-axis oriented Nb2AlC thin films deposited on c-axis sapphire (Al2O3) substrates by magnetron sputtering. Selected area electron diffraction reveal that independent of substrate temperature or film stoichiometry, there is the growth of a secondary phase not found in bulk, Nb5Al3Cx with a- and c-axis lattice constants of 7.746 Å and 5.246 Å, respectively. Scanning electron micrographs reveal large surface features, many with hexagonal shape and faceted texture. Atomic force microscopy topographical measurements indicate a surface roughness of approximately 15% of the total film thickness. Electrical transport measurements show typical metal-like conduction with a room temperature resistivity of ≈ 0.9 μΩ-m and a residual resistivity ratio of 2.5. A superconducting transition was found at ≈ 440 mK.

UR - http://www.scopus.com/inward/record.url?scp=60249102039&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=60249102039&partnerID=8YFLogxK

U2 - 10.1016/j.tsf.2008.12.047

DO - 10.1016/j.tsf.2008.12.047

M3 - Article

AN - SCOPUS:60249102039

SN - 0040-6090

VL - 517

SP - 2920

EP - 2923

JO - Thin Solid Films

JF - Thin Solid Films

IS - 9

ER -

Synthesis and characterization of Nb₂AlC thin films

Abstract

All Science Journal Classification (ASJC) codes

Access to Document

Other files and links

Fingerprint

Cite this