Synthesis and characterization of Nb2AlC thin films

T. H. Scabarozi, J. Roche, A. Rosenfeld, S. H. Lim, L. Salamanca-Riba, G. Yong, I. Takeuchi, M. W. Barsoum, J. D. Hettinger, S. E. Lofland

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We report on the synthesis and characterization of epitaxial c-axis oriented Nb2AlC thin films deposited on c-axis sapphire (Al2O3) substrates by magnetron sputtering. Selected area electron diffraction reveal that independent of substrate temperature or film stoichiometry, there is the growth of a secondary phase not found in bulk, Nb5Al3Cx with a- and c-axis lattice constants of 7.746 Å and 5.246 Å, respectively. Scanning electron micrographs reveal large surface features, many with hexagonal shape and faceted texture. Atomic force microscopy topographical measurements indicate a surface roughness of approximately 15% of the total film thickness. Electrical transport measurements show typical metal-like conduction with a room temperature resistivity of ≈ 0.9 μΩ-m and a residual resistivity ratio of 2.5. A superconducting transition was found at ≈ 440 mK.

Original languageEnglish (US)
Pages (from-to)2920-2923
Number of pages4
JournalThin Solid Films
Issue number9
StatePublished - Mar 2 2009

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Surfaces and Interfaces
  • Surfaces, Coatings and Films
  • Metals and Alloys
  • Materials Chemistry


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