Keyphrases
Micro-electro-mechanical Systems
100%
All-polymer
100%
Treatment Step
42%
Oxygen Plasma
42%
Surface Chemistry
28%
3-aminopropyltriethoxysilane
28%
Challenging Tasks
14%
Uniform Coating
14%
Silanol
14%
Solution-coating
14%
High Flexibility
14%
Essential Surface
14%
Alignment Capability
14%
Critical Failure Surface
14%
Surface Modification
14%
Glass Device
14%
Polymer Microfluidic Device
14%
Polydimethylsiloxane PDMS
14%
Device Assembly
14%
Silicon Devices
14%
Lithography
14%
Sandwich Structure
14%
Polymer Type
14%
Compatible Process
14%
Silane Solution
14%
Surface Hydrophobicity
14%
Engineering
Silicon Device
25%
Hydrophilic Surface
25%
Polydimethylsiloxane
25%
Material Science
Surface Treatment
25%
Silane
25%
Silicon Device
25%