Surface treatment of polymers for the fabrication of all-polymer microfluidic devices

Jiheng Zhao, Debra A. Sheadel, Wei Xue

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

Polymer microfluidics has received considerable attention due to their low cost, remarkable biocompatibility, and high flexibility when compared to glass and silicon devices. However, the fabrication process of all-polymer devices can be complicated. In particular, different types of polymers possess different properties in terms of surface chemistry and hydrophilicity, making device assembly a challenging task. In this paper, we demonstrate the fabrication of an all-polymer device through the investigation of the essential surface treatment methods. A hybrid SU-8-SU-8-polydimethylsiloxane (PDMS) sandwiched structure is used in this research. Both untreated SU-8 and PDMS are hydrophobic and they have different surface chemistry properties, so surface modifications are necessary. Three critical surface treatment steps are used in our process. The first step is to treat the first SU-8 layer with low-power (10 W) oxygen plasma, making its surface hydrophilic. This step enables the uniform coating of the second SU-8 layer. The next surface treatment is on the second SU-8 layer. Both oxygen plasma (40 W) etching and diluted 3- aminopropyltriethoxysilane (APTES, a silane solution) coating are needed. APTES introduces amine (Si-NH2) groups on the surface. The last treatment step is to introduce silanol (Si-OH) groups on PDMS using oxygen plasma. These surface treatment steps are critical in the fabrication process and can determine the quality of the final device.

Original languageEnglish (US)
Title of host publicationASME 2012 International Mechanical Engineering Congress and Exposition, IMECE 2012
Pages507-511
Number of pages5
EditionPARTS A AND B
DOIs
StatePublished - Dec 1 2012
Externally publishedYes
EventASME 2012 International Mechanical Engineering Congress and Exposition, IMECE 2012 - Houston, TX, United States
Duration: Nov 9 2012Nov 15 2012

Publication series

NameASME International Mechanical Engineering Congress and Exposition, Proceedings (IMECE)
NumberPARTS A AND B
Volume9

Other

OtherASME 2012 International Mechanical Engineering Congress and Exposition, IMECE 2012
Country/TerritoryUnited States
CityHouston, TX
Period11/9/1211/15/12

All Science Journal Classification (ASJC) codes

  • Mechanical Engineering

Fingerprint

Dive into the research topics of 'Surface treatment of polymers for the fabrication of all-polymer microfluidic devices'. Together they form a unique fingerprint.

Cite this