TY - GEN
T1 - Student-centered microsystem and nanotechnology courses and laboratories for mechanical engineering students
AU - Xue, Wei
PY - 2010
Y1 - 2010
N2 - Modern society has been drastically changed by the rapid development of miniature science and engineering. In order to improve the microsystem and nanotechnology education, we developed a student-centered experimental module for two laboratory-intensive courses: Micro/Nano Technology and Microelectromechanical Systems (MEMS) Engineering. The experimental module emphasizes hands-on experience and it is seamlessly integrated into the course structures. The developed laboratory activities include photomask layout design, photolithography, isotropic and anisotropic wet etching, bulk micromachining, optical microscopy, surface profiling based on light interferometry, scanning electron microscopy (SEM), and atomic force microscopy (AFM). The students benefit from gaining a better understanding of the course topics by designing their own structures that meet the design requirements and by fabricating their own devices. The laboratory results are satisfactory and show that the experimental module is effective in teaching microsystems and nanotechnology at both the undergraduate and graduate levels.,.
AB - Modern society has been drastically changed by the rapid development of miniature science and engineering. In order to improve the microsystem and nanotechnology education, we developed a student-centered experimental module for two laboratory-intensive courses: Micro/Nano Technology and Microelectromechanical Systems (MEMS) Engineering. The experimental module emphasizes hands-on experience and it is seamlessly integrated into the course structures. The developed laboratory activities include photomask layout design, photolithography, isotropic and anisotropic wet etching, bulk micromachining, optical microscopy, surface profiling based on light interferometry, scanning electron microscopy (SEM), and atomic force microscopy (AFM). The students benefit from gaining a better understanding of the course topics by designing their own structures that meet the design requirements and by fabricating their own devices. The laboratory results are satisfactory and show that the experimental module is effective in teaching microsystems and nanotechnology at both the undergraduate and graduate levels.,.
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U2 - 10.1115/IMECE2010-37204
DO - 10.1115/IMECE2010-37204
M3 - Conference contribution
AN - SCOPUS:84881462413
SN - 9780791844434
T3 - ASME International Mechanical Engineering Congress and Exposition, Proceedings (IMECE)
SP - 95
EP - 100
BT - Engineering Education and Professional Development
PB - American Society of Mechanical Engineers (ASME)
T2 - ASME 2010 International Mechanical Engineering Congress and Exposition, IMECE 2010
Y2 - 12 November 2010 through 18 November 2010
ER -