Student-centered microsystem and nanotechnology courses and laboratories for mechanical engineering students

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

Modern society has been drastically changed by the rapid development of miniature science and engineering. In order to improve the microsystem and nanotechnology education, we developed a student-centered experimental module for two laboratory-intensive courses: Micro/Nano Technology and Microelectromechanical Systems (MEMS) Engineering. The experimental module emphasizes hands-on experience and it is seamlessly integrated into the course structures. The developed laboratory activities include photomask layout design, photolithography, isotropic and anisotropic wet etching, bulk micromachining, optical microscopy, surface profiling based on light interferometry, scanning electron microscopy (SEM), and atomic force microscopy (AFM). The students benefit from gaining a better understanding of the course topics by designing their own structures that meet the design requirements and by fabricating their own devices. The laboratory results are satisfactory and show that the experimental module is effective in teaching microsystems and nanotechnology at both the undergraduate and graduate levels.,.

Original languageEnglish (US)
Title of host publicationASME 2010 International Mechanical Engineering Congress and Exposition, IMECE 2010
Pages95-100
Number of pages6
DOIs
StatePublished - Dec 1 2010
EventASME 2010 International Mechanical Engineering Congress and Exposition, IMECE 2010 - Vancouver, BC, Canada
Duration: Nov 12 2010Nov 18 2010

Publication series

NameASME International Mechanical Engineering Congress and Exposition, Proceedings (IMECE)
Volume6

Other

OtherASME 2010 International Mechanical Engineering Congress and Exposition, IMECE 2010
CountryCanada
CityVancouver, BC
Period11/12/1011/18/10

All Science Journal Classification (ASJC) codes

  • Mechanical Engineering

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  • Cite this

    Xue, W. (2010). Student-centered microsystem and nanotechnology courses and laboratories for mechanical engineering students. In ASME 2010 International Mechanical Engineering Congress and Exposition, IMECE 2010 (pp. 95-100). (ASME International Mechanical Engineering Congress and Exposition, Proceedings (IMECE); Vol. 6). https://doi.org/10.1115/IMECE2010-37204