TY - GEN
T1 - Stress engineering for free-standing SU-8 2002 thin film devices
AU - Oliver, Kyle W.
AU - Lukes, Sarah J.
AU - Moghimi, Mohammad J.
AU - Dickensheets, David L.
PY - 2012
Y1 - 2012
N2 - In this paper we describe a process for creating thin SU-8 2002 films between 1.5 ?m and 3.0 ?m thick that are hardbaked and can withstand a release etch in either aqueous or plasma silicon etchants. Resulting films are characterized using both wafer bow and membrane bulge tests to monitor in-plane stress and Young's modulus. We explore the influence on final film stress of several process variables including hard bake temperature, exposure dose, film thickness, and various temperature profiles. We observe resultant film stress in the range of 13.8 to 32 MPa, and Young's modulus in the range of 2.1 to 5.2 GPa for free-standing membranes. Illustrative process recipes are described for both patterned and un-patterned SU-8 2002 membrane devices.
AB - In this paper we describe a process for creating thin SU-8 2002 films between 1.5 ?m and 3.0 ?m thick that are hardbaked and can withstand a release etch in either aqueous or plasma silicon etchants. Resulting films are characterized using both wafer bow and membrane bulge tests to monitor in-plane stress and Young's modulus. We explore the influence on final film stress of several process variables including hard bake temperature, exposure dose, film thickness, and various temperature profiles. We observe resultant film stress in the range of 13.8 to 32 MPa, and Young's modulus in the range of 2.1 to 5.2 GPa for free-standing membranes. Illustrative process recipes are described for both patterned and un-patterned SU-8 2002 membrane devices.
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U2 - 10.1117/12.910967
DO - 10.1117/12.910967
M3 - Conference contribution
AN - SCOPUS:84858965585
SN - 9780819488916
T3 - Progress in Biomedical Optics and Imaging - Proceedings of SPIE
BT - Micromachining and Microfabrication Process Technology XVII
T2 - Micromachining and Microfabrication Process Technology XVII
Y2 - 24 January 2012 through 26 January 2012
ER -