Single-walled carbon nanotube micropatterns and interconnections fabricated with layer-by-layer nano self-assembly and microlithography on flexible substrates

Wei Xue, Tianhong Cui

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

The fabrication and characterization of single-walled carbon nanotube (SWNT) multilayers, micropatterns and interconnections on plastic substrates are reported in this paper. The SWNT-based multilayers and devices are fabricated with a simple, fast, inexpensive, low-temperature, and highly efficient technique combining layer-by-layer (LbL) nano self-assembly, microlithography, and lift-off techniques. The SWNT multilayers are alternating layers of SWNTs and poly (dimethyldiallylammonium chloride) (PDDA). Lithography and lift-off techniques are used to pattern the SWNT multilayers. SWNT microstructures with linewidth of 5 μm are fabricated and characterized. The thickness of a (PDDA/SWNT) bi-layer is approximately 76 A. Two-terminal SWNT thin film based interconnections are fabricated on flexible substrates. Current-voltage (I-V) characterization and four-point probe measurement show that the resistance of the interconnection is nonlinearly inversely proportional to the number of the assembled SWNT layers. The nano-assembled polymer/SWNT composite can be used in many applications due to its low cost, light weight, and long lifetime.

Original languageEnglish (US)
Title of host publicationProceedings of MNT for Aerospace Applications, CANEUS2006
PublisherAmerican Society of Mechanical Engineers
ISBN (Print)0791837874, 9780791837870
DOIs
StatePublished - 2006
Externally publishedYes
EventMicro-Nano-technology for Aerospace Applications, CANEUS2006 - Toulouse, France
Duration: Aug 27 2006Sep 1 2006

Publication series

NameProceedings of MNT for Aerospace Applications, CANEUS2006
Volume2006

Other

OtherMicro-Nano-technology for Aerospace Applications, CANEUS2006
Country/TerritoryFrance
CityToulouse
Period8/27/069/1/06

All Science Journal Classification (ASJC) codes

  • General Engineering

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