TY - GEN
T1 - Single-walled carbon nanotube micropatterns and cantilever array fabricated with electrostatic layer-by-layer nano self-assembly and lithography
AU - Xue, Wei
AU - Cui, Tianhong
PY - 2006/1/1
Y1 - 2006/1/1
N2 - A simple and effective approach is presented for patterning single-walled carbon nanotube (SWNT) microstructures by combining electrostatic layer-by-layer (LbL) nano self-assembly, lithography, and lift-off. This technique provides a simple, low-cost, and low-temperature fabrication method with a short processing time. SWNT micropatterns with feature sizes as small as 5 µm were fabricated and characterized. The thickness of a (PDDA/SWNT) bi-layer was measured approximately as 76 Å. To investigate the potential applications of SWNTs, magnetic cantilever arrays consist of SWNTs, iron oxide (Fe2O3) nanoparticles, and polyelectrolytes were developed. Due to the outstanding mechanical properties of the SWNTs, the fabricated cantilever arrays are strong and flexible. The cantilever arrays can be used in applications such as biosensors and microvalves.
AB - A simple and effective approach is presented for patterning single-walled carbon nanotube (SWNT) microstructures by combining electrostatic layer-by-layer (LbL) nano self-assembly, lithography, and lift-off. This technique provides a simple, low-cost, and low-temperature fabrication method with a short processing time. SWNT micropatterns with feature sizes as small as 5 µm were fabricated and characterized. The thickness of a (PDDA/SWNT) bi-layer was measured approximately as 76 Å. To investigate the potential applications of SWNTs, magnetic cantilever arrays consist of SWNTs, iron oxide (Fe2O3) nanoparticles, and polyelectrolytes were developed. Due to the outstanding mechanical properties of the SWNTs, the fabricated cantilever arrays are strong and flexible. The cantilever arrays can be used in applications such as biosensors and microvalves.
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M3 - Conference contribution
AN - SCOPUS:34548110463
T3 - Technical Digest - Solid-State Sensors, Actuators, and Microsystems Workshop
SP - 328
EP - 331
BT - 2006 Solid-State Sensors, Actuators, and Microsystems Workshop, Hilton Head 2006
A2 - Spangler, Leland
A2 - Kenny, Thomas W.
PB - Transducer Research Foundation
T2 - 13th Solid-State Sensors, Actuators, and Microsystems Workshop, Hilton Head 2006
Y2 - 4 June 2006 through 8 June 2006
ER -