Single-walled carbon nanotube micropatterns and cantilever array fabricated with electrostatic layer-by-layer nano self-assembly and lithography

Wei Xue, Tianhong Cui

Research output: Chapter in Book/Report/Conference proceedingConference contribution

3 Scopus citations

Abstract

A simple and effective approach is presented for patterning single-walled carbon nanotube (SWNT) microstructures by combining electrostatic layer-by-layer (LbL) nano self-assembly, lithography, and lift-off. This technique provides a simple, low-cost, and low-temperature fabrication method with a short processing time. SWNT micropatterns with feature sizes as small as 5 µm were fabricated and characterized. The thickness of a (PDDA/SWNT) bi-layer was measured approximately as 76 Å. To investigate the potential applications of SWNTs, magnetic cantilever arrays consist of SWNTs, iron oxide (Fe2O3) nanoparticles, and polyelectrolytes were developed. Due to the outstanding mechanical properties of the SWNTs, the fabricated cantilever arrays are strong and flexible. The cantilever arrays can be used in applications such as biosensors and microvalves.

Original languageEnglish (US)
Title of host publication2006 Solid-State Sensors, Actuators, and Microsystems Workshop, Hilton Head 2006
EditorsLeland Spangler, Thomas W. Kenny
PublisherTransducer Research Foundation
Pages328-331
Number of pages4
ISBN (Electronic)0964002469, 9780964002463
Publication statusPublished - Jan 1 2006
Event13th Solid-State Sensors, Actuators, and Microsystems Workshop, Hilton Head 2006 - Hilton Head Island, United States
Duration: Jun 4 2006Jun 8 2006

Publication series

NameTechnical Digest - Solid-State Sensors, Actuators, and Microsystems Workshop

Conference

Conference13th Solid-State Sensors, Actuators, and Microsystems Workshop, Hilton Head 2006
CountryUnited States
CityHilton Head Island
Period6/4/066/8/06

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All Science Journal Classification (ASJC) codes

  • Control and Systems Engineering
  • Electrical and Electronic Engineering
  • Hardware and Architecture

Cite this

Xue, W., & Cui, T. (2006). Single-walled carbon nanotube micropatterns and cantilever array fabricated with electrostatic layer-by-layer nano self-assembly and lithography. In L. Spangler, & T. W. Kenny (Eds.), 2006 Solid-State Sensors, Actuators, and Microsystems Workshop, Hilton Head 2006 (pp. 328-331). (Technical Digest - Solid-State Sensors, Actuators, and Microsystems Workshop). Transducer Research Foundation.