Abstract
The structural and magnetic properties of dilutely doped 3d elements in pulsed laser deposition (PLD) grown HfO 2 high-k dielectric thin films were studied. Monoclinc phase of HfO 2 was stabilized by Co- and Fe- substitution at significantly low growth temperature. High purity HfO 2, CoO and Fe 2O 3 powders were mixed throughly in the required ratio for 5mol% Co and Fe doping in HfO 2. The results from atomic force microscopy showed possible segregation of Fe 3O 4 phase in the form of nanoscale mounds.
Original language | English (US) |
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Article number | D6.13 |
Pages (from-to) | 299-312 |
Number of pages | 14 |
Journal | Materials Research Society Symposium Proceedings |
Volume | 830 |
State | Published - 2005 |
Event | Materials and Processes for Nonvolatile Memories - Boston, MA, United States Duration: Nov 30 2004 → Dec 2 2004 |
All Science Journal Classification (ASJC) codes
- General Materials Science
- Condensed Matter Physics
- Mechanics of Materials
- Mechanical Engineering