Raman spectroscopy diagnostics for high-tc thin films

L. A. Farrow; Siu Wai Chan; L. H. Greene; W. L. Feldmann; T. Venkatesan; W. A. Bonner; R. R. Krchnavek; S. J. Allen

doi:10.1117/12.965169

Raman spectroscopy diagnostics for high-t_c thin films

L. A. Farrow, Siu Wai Chan, L. H. Greene, W. L. Feldmann, T. Venkatesan, W. A. Bonner, R. R. Krchnavek, S. J. Allen

Research output: Contribution to journal › Article › peer-review

Abstract

Raman spectroscopy can provide information about stoichiometry, oxygen content, and crystal structure of high-T_C thin films in a rapid, contactless, non-destructive manner at room temperature. Data are presented for both polycrystalline and single crystal-like films. An example is given of the potential utility for direct local analysis of patterned films with features as small as 1μ m.

Original language	English (US)
Pages (from-to)	282-289
Number of pages	8
Journal	Proceedings of SPIE - The International Society for Optical Engineering
Volume	1187
DOIs	https://doi.org/10.1117/12.965169
State	Published - Mar 19 1990
Externally published	Yes

All Science Journal Classification (ASJC) codes

Electronic, Optical and Magnetic Materials
Condensed Matter Physics
Computer Science Applications
Applied Mathematics
Electrical and Electronic Engineering

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10.1117/12.965169

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abstract = "Raman spectroscopy can provide information about stoichiometry, oxygen content, and crystal structure of high-TC thin films in a rapid, contactless, non-destructive manner at room temperature. Data are presented for both polycrystalline and single crystal-like films. An example is given of the potential utility for direct local analysis of patterned films with features as small as 1μ m.",

author = "Farrow, {L. A.} and Chan, {Siu Wai} and Greene, {L. H.} and Feldmann, {W. L.} and T. Venkatesan and Bonner, {W. A.} and Krchnavek, {R. R.} and Allen, {S. J.}",

year = "1990",

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doi = "10.1117/12.965169",

language = "English (US)",

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TY - JOUR

T1 - Raman spectroscopy diagnostics for high-tc thin films

AU - Farrow, L. A.

AU - Chan, Siu Wai

AU - Greene, L. H.

AU - Feldmann, W. L.

AU - Venkatesan, T.

AU - Bonner, W. A.

AU - Krchnavek, R. R.

AU - Allen, S. J.

PY - 1990/3/19

Y1 - 1990/3/19

N2 - Raman spectroscopy can provide information about stoichiometry, oxygen content, and crystal structure of high-TC thin films in a rapid, contactless, non-destructive manner at room temperature. Data are presented for both polycrystalline and single crystal-like films. An example is given of the potential utility for direct local analysis of patterned films with features as small as 1μ m.

AB - Raman spectroscopy can provide information about stoichiometry, oxygen content, and crystal structure of high-TC thin films in a rapid, contactless, non-destructive manner at room temperature. Data are presented for both polycrystalline and single crystal-like films. An example is given of the potential utility for direct local analysis of patterned films with features as small as 1μ m.

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JO - Proceedings of SPIE - The International Society for Optical Engineering

JF - Proceedings of SPIE - The International Society for Optical Engineering

ER -

Raman spectroscopy diagnostics for high-t_c thin films

Abstract

All Science Journal Classification (ASJC) codes

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