Fingerprint
Dive into the research topics of 'Pulsed plasma enhanced chemical vapor deposition from CH2F2, C2H2F4, and CHClF2'. Together they form a unique fingerprint.- Sort by
- Weight
- Alphabetically
Pulsed plasma enhanced chemical vapor deposition from CH2F2, C2H2F4, and CHClF2
Catherine B. Labelle, Kenneth K.S. Lau, Karen K. Gleason
Research output: Contribution to journal › Conference article › peer-review
20
Scopus
citations