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Process modeling and device-package simulation for optimization of MEMS gyroscopes
Xiaolin Chen, Wei Cui,
Wei Xue
Research output
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Contribution to journal
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Article
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peer-review
4
Scopus citations
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Keyphrases
Design Verification
100%
MEMS Simulation
100%
Behavior Characterization
100%
Thermal Stress
100%
Device Design
100%
MEMS Tuning Fork Gyroscope
100%
Multi-level Simulation
100%
Mask Layout
100%
Device Level
100%
Integrated Simulation
100%
MEMS Devices
100%
Package Deformation
100%
Simulation Workflow
100%
Mask Fabrication
100%
Engineering
Product Development Cycle
50%
Thermal Stress
50%
Design Verification
50%
Tuning Fork
50%