Polymeric nanocoatings by hot-wire chemical vapor deposition (HWCVD)

Kenneth K.S. Lau, Yu Mao, Hilton G.Pryce Lewis, Shashi K. Murthy, Brad D. Olsen, Leslie S. Loo, Karen K. Gleason

Research output: Contribution to journalConference articlepeer-review

40 Scopus citations


Hot-wire chemical vapor deposition (HWCVD) of polymers affords the ability to coat objects of complex shape and nanoscale features. Using hot filaments to drive the gas phase chemistry has enabled the deposition of true linear polymers rather than the highly cross-linked organic networks typically associated with plasma enhanced CVD. The HWCVD method is particularly valuable for creating ultrathin layers of insoluble polymers, such as polytetrafluoroethylene (PTFE, Teflon-TM) and polyoxymethylene (POM, Delrin-TM). Additionally, organosilicon polymers, fluoroorganosilicon copolymers, and vinyl hydrocarbon polymers have all been demonstrated by HWCVD. The object to be coated remains at room temperature, promoting the required adsorption of film forming species.

Original languageEnglish (US)
Pages (from-to)211-215
Number of pages5
JournalThin Solid Films
Issue number1-2
StatePublished - Apr 20 2006
Externally publishedYes
EventProceedings of the Third International Conference on Hot-Wire -
Duration: Aug 23 2004Aug 27 2004

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Surfaces and Interfaces
  • Surfaces, Coatings and Films
  • Metals and Alloys
  • Materials Chemistry


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