TY - JOUR
T1 - Polymeric nanocoatings by hot-wire chemical vapor deposition (HWCVD)
AU - Lau, Kenneth K.S.
AU - Mao, Yu
AU - Lewis, Hilton G.Pryce
AU - Murthy, Shashi K.
AU - Olsen, Brad D.
AU - Loo, Leslie S.
AU - Gleason, Karen K.
N1 - Funding Information:
We gratefully acknowledge the support of the NSF/SRC Engineering Research Center for Environmentally Benign Semiconductor Manufacturing, the National Institutes of Health under contract NO1-NS-9-2323, and the Cambridge–MIT Institute (CMI) Project of Carbon Nanotube Enabled Materials. This work made use of MRSEC Shared Facilities supported by the National Science Foundation under Award Number DMR-9400334, MIT's shared scanning-electron-beam-lithography facility in the Research Laboratory of Electronics, and the NMR facilities of Chemistry Department at MIT. We also thank Professor Chris K. Ober's group at Cornell University, Professor Gareth H. McKinley's group at MIT and Professor William I Milne's group at Cambridge University for their collaborative efforts.
PY - 2006/4/20
Y1 - 2006/4/20
N2 - Hot-wire chemical vapor deposition (HWCVD) of polymers affords the ability to coat objects of complex shape and nanoscale features. Using hot filaments to drive the gas phase chemistry has enabled the deposition of true linear polymers rather than the highly cross-linked organic networks typically associated with plasma enhanced CVD. The HWCVD method is particularly valuable for creating ultrathin layers of insoluble polymers, such as polytetrafluoroethylene (PTFE, Teflon-TM) and polyoxymethylene (POM, Delrin-TM). Additionally, organosilicon polymers, fluoroorganosilicon copolymers, and vinyl hydrocarbon polymers have all been demonstrated by HWCVD. The object to be coated remains at room temperature, promoting the required adsorption of film forming species.
AB - Hot-wire chemical vapor deposition (HWCVD) of polymers affords the ability to coat objects of complex shape and nanoscale features. Using hot filaments to drive the gas phase chemistry has enabled the deposition of true linear polymers rather than the highly cross-linked organic networks typically associated with plasma enhanced CVD. The HWCVD method is particularly valuable for creating ultrathin layers of insoluble polymers, such as polytetrafluoroethylene (PTFE, Teflon-TM) and polyoxymethylene (POM, Delrin-TM). Additionally, organosilicon polymers, fluoroorganosilicon copolymers, and vinyl hydrocarbon polymers have all been demonstrated by HWCVD. The object to be coated remains at room temperature, promoting the required adsorption of film forming species.
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U2 - 10.1016/j.tsf.2005.07.208
DO - 10.1016/j.tsf.2005.07.208
M3 - Conference article
AN - SCOPUS:32644431782
SN - 0040-6090
VL - 501
SP - 211
EP - 215
JO - Thin Solid Films
JF - Thin Solid Films
IS - 1-2
T2 - Proceedings of the Third International Conference on Hot-Wire
Y2 - 23 August 2004 through 27 August 2004
ER -