Photodefmable benzocyclobutene as an optical waveguide material

Casey F. Kane, Robert R. Krchnavek

Research output: Contribution to journalConference articlepeer-review

6 Scopus citations


Optical channel waveguides with single-mode dimensions have been fabricated using a photodefinablepolymer system based on the benzocyclobutene resin and a bisarylazide photo-crosslinking agent. This photopolymer offers a simple technique for fabricating optical interconnects in multi-chip modules. The processingconditions and developer selection required for the fabrication of benzocyclobutene optical waveguides is presented.With the losses in the waveguide typically less than 1 dB/cm, this material system is suitable for use in a variety ofoptical interconnect problems.

Original languageEnglish (US)
Pages (from-to)200-207
Number of pages8
JournalProceedings of SPIE - The International Society for Optical Engineering
StatePublished - May 2 1994
Externally publishedYes
EventOptoelectronic Interconnects II 1994 - Los Angeles, United States
Duration: Jan 23 1994Jan 29 1994

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Computer Science Applications
  • Applied Mathematics
  • Electrical and Electronic Engineering


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