Photodefmable benzocyclobutene as an optical waveguide material

Casey F. Kane; Robert R. Krchnavek

doi:10.1117/12.174508

Photodefmable benzocyclobutene as an optical waveguide material

Casey F. Kane, Robert R. Krchnavek

Research output: Contribution to journal › Conference article › peer-review

6 Scopus citations

Abstract

Optical channel waveguides with single-mode dimensions have been fabricated using a photodefinablepolymer system based on the benzocyclobutene resin and a bisarylazide photo-crosslinking agent. This photopolymer offers a simple technique for fabricating optical interconnects in multi-chip modules. The processingconditions and developer selection required for the fabrication of benzocyclobutene optical waveguides is presented.With the losses in the waveguide typically less than 1 dB/cm, this material system is suitable for use in a variety ofoptical interconnect problems.

Original language	English (US)
Pages (from-to)	200-207
Number of pages	8
Journal	Proceedings of SPIE - The International Society for Optical Engineering
Volume	2153
DOIs	https://doi.org/10.1117/12.174508
State	Published - May 2 1994
Externally published	Yes
Event	Optoelectronic Interconnects II 1994 - Los Angeles, United States Duration: Jan 23 1994 → Jan 29 1994

All Science Journal Classification (ASJC) codes

Electronic, Optical and Magnetic Materials
Condensed Matter Physics
Computer Science Applications
Applied Mathematics
Electrical and Electronic Engineering

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10.1117/12.174508

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abstract = "Optical channel waveguides with single-mode dimensions have been fabricated using a photodefinablepolymer system based on the benzocyclobutene resin and a bisarylazide photo-crosslinking agent. This photopolymer offers a simple technique for fabricating optical interconnects in multi-chip modules. The processingconditions and developer selection required for the fabrication of benzocyclobutene optical waveguides is presented.With the losses in the waveguide typically less than 1 dB/cm, this material system is suitable for use in a variety ofoptical interconnect problems.",

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AU - Kane, Casey F.

AU - Krchnavek, Robert R.

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N2 - Optical channel waveguides with single-mode dimensions have been fabricated using a photodefinablepolymer system based on the benzocyclobutene resin and a bisarylazide photo-crosslinking agent. This photopolymer offers a simple technique for fabricating optical interconnects in multi-chip modules. The processingconditions and developer selection required for the fabrication of benzocyclobutene optical waveguides is presented.With the losses in the waveguide typically less than 1 dB/cm, this material system is suitable for use in a variety ofoptical interconnect problems.

AB - Optical channel waveguides with single-mode dimensions have been fabricated using a photodefinablepolymer system based on the benzocyclobutene resin and a bisarylazide photo-crosslinking agent. This photopolymer offers a simple technique for fabricating optical interconnects in multi-chip modules. The processingconditions and developer selection required for the fabrication of benzocyclobutene optical waveguides is presented.With the losses in the waveguide typically less than 1 dB/cm, this material system is suitable for use in a variety ofoptical interconnect problems.

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M3 - Conference article

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JO - Proceedings of SPIE - The International Society for Optical Engineering

JF - Proceedings of SPIE - The International Society for Optical Engineering

T2 - Optoelectronic Interconnects II 1994

Y2 - 23 January 1994 through 29 January 1994

ER -

Photodefmable benzocyclobutene as an optical waveguide material

Abstract

All Science Journal Classification (ASJC) codes

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