TY - JOUR
T1 - Micro-supercapacitors from carbide derived carbon (CDC) films on silicon chips
AU - Huang, Peihua
AU - Heon, Min
AU - Pech, David
AU - Brunet, Magali
AU - Taberna, Pierre Louis
AU - Gogotsi, Yury
AU - Lofland, Samuel
AU - Hettinger, Jeffrey D.
AU - Simon, Patrice
N1 - Funding Information:
We acknowledge the Partnership Universities Fund (PUF) for funding the US-French collaboration. Microfabrication was conducted in the Micro and nano technologies platform of LAAS-CNRS and electrochemical characterization at CIRIMAT laboratory. Research done by M.H and Y.G. was supported by the U.S. Department of Energy, Office of Basic Energy Sciences, Division of Materials Sciences and Engineering under Award # DE-FG02-07ER46473).
PY - 2013/3/1
Y1 - 2013/3/1
N2 - Interdigitated on-chip micro-supercapacitors based on Carbide Derived Carbon (CDC) films were fabricated and tested. A titanium carbide (TiC) film was patterned and treated with chlorine to obtain a TiC derived carbon (TiC-CDC) film, followed by the deposition of two types of current collectors (Ti/Au and Al) using standard micro-fabrication processes. CDC based micro-supercapacitors were electrochemically characterized by cyclic voltammetry and impedance spectroscopy using a 1 M tetraethylammonium tetrafluoroborate, NEt 4BF4, in propylene carbonate (PC) electrolyte. A capacitance of 0.78 mF for the device and 1.5 mF cm-2 as the specific capacitance for the footprint of the device was measured for a 2 V potential range at 100 mV s-1. A specific energy of 3.0 mJ cm-2 and a specific power of 84 mW cm-2 were calculated for the devices. These devices provide a pathway for fabricating pure carbon-based micro-supercapacitors by micro-fabrication, and can be used for powering micro-electromechanical systems (MEMS) and electronic devices.
AB - Interdigitated on-chip micro-supercapacitors based on Carbide Derived Carbon (CDC) films were fabricated and tested. A titanium carbide (TiC) film was patterned and treated with chlorine to obtain a TiC derived carbon (TiC-CDC) film, followed by the deposition of two types of current collectors (Ti/Au and Al) using standard micro-fabrication processes. CDC based micro-supercapacitors were electrochemically characterized by cyclic voltammetry and impedance spectroscopy using a 1 M tetraethylammonium tetrafluoroborate, NEt 4BF4, in propylene carbonate (PC) electrolyte. A capacitance of 0.78 mF for the device and 1.5 mF cm-2 as the specific capacitance for the footprint of the device was measured for a 2 V potential range at 100 mV s-1. A specific energy of 3.0 mJ cm-2 and a specific power of 84 mW cm-2 were calculated for the devices. These devices provide a pathway for fabricating pure carbon-based micro-supercapacitors by micro-fabrication, and can be used for powering micro-electromechanical systems (MEMS) and electronic devices.
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U2 - 10.1016/j.jpowsour.2012.10.020
DO - 10.1016/j.jpowsour.2012.10.020
M3 - Article
AN - SCOPUS:84868582934
VL - 225
SP - 240
EP - 244
JO - Journal of Power Sources
JF - Journal of Power Sources
SN - 0378-7753
ER -