MEMS deformable mirrors for focus control in vital microscopy

B. Jeffrey Lutzenburger; Mohammad J. Moghimi; Sarah J. Lukes; Brant Kaylor; David L. Dickensheets

doi:10.1117/12.843874

MEMS deformable mirrors for focus control in vital microscopy

B. Jeffrey Lutzenburger, Mohammad J. Moghimi, Sarah J. Lukes, Brant Kaylor, David L. Dickensheets

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

6 Scopus citations

Abstract

This paper describes deformable membrane mirrors designed for focus control and aberration compensation in vital microscopy and shows microscope images obtained using these mirrors. The mirrors are metalized polymer membranes ranging from 1-3 mm in diameter using the photo-cured epoxy SU-8 2002, constructed using a die-bonding process. They are electrostatically actuated using three concentric electrodes to provide large displacement while minimizing spherical aberration.

Original language	English (US)
Title of host publication	MOEMS and Miniaturized Systems IX
DOIs	https://doi.org/10.1117/12.843874
State	Published - 2010
Externally published	Yes
Event	MOEMS and Miniaturized Systems IX - San Francisco, CA, United States Duration: Jan 25 2010 → Jan 27 2010

Publication series

Name	Proceedings of SPIE - The International Society for Optical Engineering
Volume	7594
ISSN (Print)	0277-786X

Conference

Conference	MOEMS and Miniaturized Systems IX
Country/Territory	United States
City	San Francisco, CA
Period	1/25/10 → 1/27/10

All Science Journal Classification (ASJC) codes

Electronic, Optical and Magnetic Materials
Condensed Matter Physics
Computer Science Applications
Applied Mathematics
Electrical and Electronic Engineering

Access to Document

10.1117/12.843874

Cite this

@inproceedings{245901d9985f47d6a08a8a76a5219e16,

title = "MEMS deformable mirrors for focus control in vital microscopy",

abstract = "This paper describes deformable membrane mirrors designed for focus control and aberration compensation in vital microscopy and shows microscope images obtained using these mirrors. The mirrors are metalized polymer membranes ranging from 1-3 mm in diameter using the photo-cured epoxy SU-8 2002, constructed using a die-bonding process. They are electrostatically actuated using three concentric electrodes to provide large displacement while minimizing spherical aberration.",

author = "Lutzenburger, {B. Jeffrey} and Moghimi, {Mohammad J.} and Lukes, {Sarah J.} and Brant Kaylor and Dickensheets, {David L.}",

year = "2010",

doi = "10.1117/12.843874",

language = "English (US)",

isbn = "9780819479907",

series = "Proceedings of SPIE - The International Society for Optical Engineering",

booktitle = "MOEMS and Miniaturized Systems IX",

note = "MOEMS and Miniaturized Systems IX ; Conference date: 25-01-2010 Through 27-01-2010",

}

Lutzenburger, BJ, Moghimi, MJ, Lukes, SJ, Kaylor, B & Dickensheets, DL 2010, MEMS deformable mirrors for focus control in vital microscopy. in MOEMS and Miniaturized Systems IX., 759406, Proceedings of SPIE - The International Society for Optical Engineering, vol. 7594, MOEMS and Miniaturized Systems IX, San Francisco, CA, United States, 1/25/10. https://doi.org/10.1117/12.843874

TY - GEN

T1 - MEMS deformable mirrors for focus control in vital microscopy

AU - Lutzenburger, B. Jeffrey

AU - Moghimi, Mohammad J.

AU - Lukes, Sarah J.

AU - Kaylor, Brant

AU - Dickensheets, David L.

PY - 2010

Y1 - 2010

N2 - This paper describes deformable membrane mirrors designed for focus control and aberration compensation in vital microscopy and shows microscope images obtained using these mirrors. The mirrors are metalized polymer membranes ranging from 1-3 mm in diameter using the photo-cured epoxy SU-8 2002, constructed using a die-bonding process. They are electrostatically actuated using three concentric electrodes to provide large displacement while minimizing spherical aberration.

AB - This paper describes deformable membrane mirrors designed for focus control and aberration compensation in vital microscopy and shows microscope images obtained using these mirrors. The mirrors are metalized polymer membranes ranging from 1-3 mm in diameter using the photo-cured epoxy SU-8 2002, constructed using a die-bonding process. They are electrostatically actuated using three concentric electrodes to provide large displacement while minimizing spherical aberration.

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U2 - 10.1117/12.843874

DO - 10.1117/12.843874

M3 - Conference contribution

AN - SCOPUS:77951566189

SN - 9780819479907

T3 - Proceedings of SPIE - The International Society for Optical Engineering

BT - MOEMS and Miniaturized Systems IX

T2 - MOEMS and Miniaturized Systems IX

Y2 - 25 January 2010 through 27 January 2010

ER -

MEMS deformable mirrors for focus control in vital microscopy

Abstract

Publication series

Conference

All Science Journal Classification (ASJC) codes

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