MASKLESS LASER WRITING OF SILICON DIOXIDE.

Keyphrases

• Organosilicate 100%
• Direct Writing Technique 50%
• Direct Laser Writing 50%
• Process Resolution 50%
• Insulating Layer 50%
• Oxide Thickness 50%

Material Science

• Film 100%
• Silicon Dioxide 100%
• Oxide Compound 50%
• Thermal Property 50%