TY - JOUR
T1 - Magnetostrictive stress reconfigurable thin film resonators for near direct current magnetoelectric sensors
AU - Kiser, Jillian
AU - Lacomb, Ron
AU - Bussmann, Konrad
AU - Hawley, Christopher J.
AU - Spanier, Jonathan E.
AU - Zhuang, Xin
AU - Dolabdjian, Christophe
AU - Lofland, Sam
AU - Finkel, Peter
PY - 2014/2/17
Y1 - 2014/2/17
N2 - The magnetic response of microdevices is significantly enhanced at structural resonance allowing for improved sensitivity and signal-to-noise ratio. Here, free-standing thin film CoFe bridge resonators have been fabricated and investigated. It is shown that the strong magnetic field dependence of the fundamental resonance frequency is a function of magnetic field orientation due to stress-induced anisotropy. These devices may offer a new approach for developing fully integrated resonant magnetic field sensing technology.
AB - The magnetic response of microdevices is significantly enhanced at structural resonance allowing for improved sensitivity and signal-to-noise ratio. Here, free-standing thin film CoFe bridge resonators have been fabricated and investigated. It is shown that the strong magnetic field dependence of the fundamental resonance frequency is a function of magnetic field orientation due to stress-induced anisotropy. These devices may offer a new approach for developing fully integrated resonant magnetic field sensing technology.
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U2 - 10.1063/1.4866044
DO - 10.1063/1.4866044
M3 - Article
AN - SCOPUS:84897432871
SN - 0003-6951
VL - 104
JO - Applied Physics Letters
JF - Applied Physics Letters
IS - 7
M1 - 072408
ER -