Abstract
A summary is given on the study of fluorocarbon films from chemical vapor deposition (CVD) chemistries. The two CVD paths of interest, pulsed PE/CVD and pyrolytic CVD, are discussed. Structural interpretation of deposited films is made from solid-state nuclear magnetic resonance (NMR) spectroscopy.
| Original language | English (US) |
|---|---|
| Pages (from-to) | 209-220 |
| Number of pages | 12 |
| Journal | Materials Research Society Symposium - Proceedings |
| Volume | 544 |
| State | Published - 1999 |
| Externally published | Yes |
| Event | Proceedings of the 1998 MRS Fall Meeting - Symposium on Plasma Deposition and Treatment of Polymers - Boston, MA, USA Duration: Nov 30 1998 → Dec 2 1998 |
All Science Journal Classification (ASJC) codes
- General Materials Science
- Condensed Matter Physics
- Mechanics of Materials
- Mechanical Engineering
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