Laser-formed oxide layers on silicon

R. R. Krchnavek, H. H. Gilgem, P. D. Brewer, S. D. Halle, Richard M. Osgood

Research output: Contribution to journal › Conference article › peer-review

Original language	English (US)
Article number	TUF4
Journal	Optics InfoBase Conference Papers
State	Published - 1983
Externally published	Yes
Event	Conference on Lasers and Electro-Optics, CLEO 1983 - Baltimore, United States Duration: May 17 1983 → May 20 1983

All Science Journal Classification (ASJC) codes

@article{ccb1bb5636a54487a56ce81cab8c8a2e,

title = "Laser-formed oxide layers on silicon",

author = "Krchnavek, {R. R.} and Gilgem, {H. H.} and Brewer, {P. D.} and Halle, {S. D.} and Osgood, {Richard M.}",

year = "1983",

language = "English (US)",

journal = "Optics InfoBase Conference Papers",

issn = "2162-2701",

note = "Conference on Lasers and Electro-Optics, CLEO 1983 ; Conference date: 17-05-1983 Through 20-05-1983",

}

TY - JOUR

T1 - Laser-formed oxide layers on silicon

AU - Krchnavek, R. R.

AU - Gilgem, H. H.

AU - Brewer, P. D.

AU - Halle, S. D.

AU - Osgood, Richard M.

PY - 1983

Y1 - 1983

UR - http://www.scopus.com/inward/record.url?scp=85136798803&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=85136798803&partnerID=8YFLogxK

M3 - Conference article

AN - SCOPUS:85136798803

SN - 2162-2701

JO - Optics InfoBase Conference Papers

JF - Optics InfoBase Conference Papers

M1 - TUF4

T2 - Conference on Lasers and Electro-Optics, CLEO 1983

Y2 - 17 May 1983 through 20 May 1983

ER -