LASER-FORMED OXIDE LAYERS ON SILICON.

R. R. Krchnavek, H. H. Gilgen, P. D. Brewer, S. D. Halle, Richard M. Osgood

Research output: Contribution to conferencePaperpeer-review

Original languageEnglish (US)
Pages40-41
Number of pages2
StatePublished - 1983
Externally publishedYes

All Science Journal Classification (ASJC) codes

  • Engineering(all)

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