LASER-FORMED OXIDE LAYERS ON SILICON.

R. R. Krchnavek, H. H. Gilgen, P. D. Brewer, S. D. Halle, Richard M. Osgood

Research output: Contribution to conference › Paper › peer-review

All Science Journal Classification (ASJC) codes

TY - CONF

T1 - LASER-FORMED OXIDE LAYERS ON SILICON.

AU - Krchnavek, R. R.

AU - Gilgen, H. H.

AU - Brewer, P. D.

AU - Halle, S. D.

AU - Osgood, Richard M.

PY - 1983

Y1 - 1983

UR - http://www.scopus.com/inward/record.url?scp=0020929404&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=0020929404&partnerID=8YFLogxK

M3 - Paper

AN - SCOPUS:0020929404

SP - 40

EP - 41

ER -