Laser direct writing of optical waveguide structures.

Robert Krchnavek, Davis H. Hartman, James W. Howse

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Scopus citations

Abstract

A maskless technique for laser direct writing of optical waveguide structures is presented. It utilizes a commercially available UV-curable, optical-quality polymer (Norland 61) spun onto a substrate in a manner analogous to photoresist and subsequently exposed using the 350-256-nm lines of an Ar-ion laser. After exposure, the substrate is developed in a solvent such as cyclopentanone, which removes the unexposed regions of the polymer. An electron micrograph of a laser-written optical waveguide is shown and discussed. The curing of the optical polymer is by photon-induced polymerization, making the process relatively insensitive to substrate parameters and permitting deposition on a variety of materials. Preliminary measurements show the loss in these guides to be acceptable for many uses in integrated optics.

Original languageEnglish (US)
Title of host publicationCLEO 88 Conf Lasers Electro Opt 1988 Tech Dig Ser Vol 7
PublisherPubl by IEEE
ISBN (Print)155752033X
StatePublished - Dec 1 1988
Externally publishedYes

Publication series

NameCLEO 88 Conf Lasers Electro Opt 1988 Tech Dig Ser Vol 7

All Science Journal Classification (ASJC) codes

  • Engineering(all)

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