Laser direct writing of channel waveguides using spin-on polymers

Robert R. Krchnavek, Gail R. Lalk, Davis H. Hartman

Research output: Contribution to journalArticlepeer-review

40 Scopus citations

Abstract

A focused argon-ion laser beam (λ=350 nm) is used to fabricate optical channel waveguides on oxidized silicon wafers using a commerically available spin-on polymer. The polymerization process is photon induced, thus allowing the reaction to occur in a room-temperature ambient. This allows the fabrication of waveguides on a variety of substrates including those with low melting points. The losses in these waveguides are typically less then 1 dB/cm, making them applicable to a variety of optical interconnect problems. In particular, we demonstrate their use in the fabrication of an optical power tap.

Original languageEnglish (US)
Pages (from-to)5156-5160
Number of pages5
JournalJournal of Applied Physics
Volume66
Issue number11
DOIs
StatePublished - 1989
Externally publishedYes

All Science Journal Classification (ASJC) codes

  • Physics and Astronomy(all)

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