@inproceedings{19def553147440abb2a233d963a3d7c7,
title = "Laser Direct Writing of Aluminum Interconnects",
abstract = "We reprt, for the first titme, laser direct writing of good conducting aluminum interconnects. These lines were deposited from a metallorganic gas with a focused deep-uv beam and were directly connected to aluminum test structures.",
author = "T. Cacouris and G. Scelsi and R. Beach and Osgood, {R. M.} and Krchnavek, {R. R.}",
note = "Publisher Copyright: {\textcopyright} 1987 OSA/CLEO 1987; Conference on Lasers and Electro-Optics, CLEO 1987 ; Conference date: 26-04-1987 Through 01-05-1987",
year = "1987",
language = "English (US)",
series = "Optics InfoBase Conference Papers",
publisher = "Optica Publishing Group (formerly OSA)",
booktitle = "Conference on Lasers and Electro-Optics, CLEO 1987",
}