Laser Direct Writing of Aluminum Interconnects

T. Cacouris, G. Scelsi, R. Beach, R. M. Osgood, R. R. Krchnavek

Research output: Chapter in Book/Report/Conference proceedingConference contribution


We reprt, for the first titme, laser direct writing of good conducting aluminum interconnects. These lines were deposited from a metallorganic gas with a focused deep-uv beam and were directly connected to aluminum test structures.

Original languageEnglish (US)
Title of host publicationConference on Lasers and Electro-Optics, CLEO 1987
PublisherOptica Publishing Group (formerly OSA)
ISBN (Electronic)0936659491
StatePublished - 1987
Externally publishedYes
EventConference on Lasers and Electro-Optics, CLEO 1987 - Baltimore, United States
Duration: Apr 26 1987May 1 1987

Publication series

NameOptics InfoBase Conference Papers
ISSN (Electronic)2162-2701


ConferenceConference on Lasers and Electro-Optics, CLEO 1987
Country/TerritoryUnited States

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Mechanics of Materials


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