Laser direct writing of aluminum conductors

T. Cacouris, G. Scelsi, P. Shaw, R. Scarmozzino, R. M. Osgood, R. R. Krchnavek

Research output: Contribution to journalArticlepeer-review

52 Scopus citations

Abstract

We report, for the first time, the laser direct writing of high-conductivity aluminum interconnects from dimethylaluminum hydride (DMAlH). These lines were deposited from this metalorganic gas using a focused deep-ultraviolet laser beam, and the deposition process was studied as a function of several process parameters. Electrical measurements and Auger electron spectroscopy were used to characterize the quality of the laser-deposited films.

Original languageEnglish (US)
Pages (from-to)1865-1867
Number of pages3
JournalApplied Physics Letters
Volume52
Issue number22
DOIs
StatePublished - 1988
Externally publishedYes

All Science Journal Classification (ASJC) codes

  • Physics and Astronomy (miscellaneous)

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