The technology and potential roles of laser direct writing in the processing of advanced integrated electronics are reviewed. Laser direct writing uses light-enhanced chemical reactions to dope, etch, or deposit electronic materials. Laser writing has been used, for example, to repair photolithographic masks and to connect and disconnect devices on integrated circuits.
|Original language||English (US)|
|Title of host publication||Conference on Solid State Devices and Materials|
|Publisher||Business Cent for Academic Soc Japan|
|Number of pages||2|
|State||Published - Dec 1 1984|
|Name||Conference on Solid State Devices and Materials|
All Science Journal Classification (ASJC) codes