Improved micro-optoelectromechanical systems deformable mirror for in vivo optical microscopy

Mohammad J. Moghimi, Chris R. Wilson, David L. Dickensheets

Research output: Contribution to journalArticlepeer-review

9 Scopus citations

Abstract

Micro-optoelectromechanical systems (MOEMS) deformable mirrors are being developed for focus control in miniature optical systems including endoscopic microscopes and small form-factor camera lenses. A new process is described to create membrane mirrors made from the photoset polymer SU-8. The SU-8 also serves as the adhesive layer for wafer bonding, resulting in a simple, low cost fabrication process. The process details and the optical properties of the resulting focus control mirrors, which have a diameter of 2 mm, a stroke in excess of 8 μm and very low residual aberration, are described. Multiple actuation electrodes allow active control of more than 1.4 μm peak-to-peak of wavefront spherical aberration. The MOEMS mirror is demonstrated in a confocal microscope in which it provides focus control during capture of in vivo images.

Original languageEnglish (US)
Article number043006
JournalJournal of Micro/ Nanolithography, MEMS, and MOEMS
Volume11
Issue number4
DOIs
StatePublished - 2012
Externally publishedYes

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Atomic and Molecular Physics, and Optics
  • Condensed Matter Physics
  • Mechanical Engineering
  • Electrical and Electronic Engineering

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