High speed focus control capability of electrostatic-pneumatic MEMS deformable mirrors

Mohammad J. Moghimi; Krishna N. Chattergoon; David L. Dickensheets

doi:10.1117/12.2042195

High speed focus control capability of electrostatic-pneumatic MEMS deformable mirrors

Mohammad J. Moghimi, Krishna N. Chattergoon, David L. Dickensheets

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

3 Scopus citations

Abstract

MEMS deformable mirrors are versatile elements for optical focus control. Electrostatic-pneumatic actuation of the mirrors offers relatively large membrane stroke to increase focus range. Moreover, this novel actuation method provides high speed focus control with either positive or negative focus. The speed of focusing is dependent on membrane tension, membrane size, air channel configuration, and the size of the backchamber. A 3 mm diameter mirror with 5 mm diameter actuator membrane achieves 30 kHz bandwidth with electrostatic actuation and 8 kHz bandwidth with pneumatic actuation. The settling time of the step response for both electrostatic and pneumatic actuation is approximately 100μs.

Original language	English (US)
Title of host publication	MOEMS and Miniaturized Systems XIII
Publisher	SPIE
ISBN (Print)	9780819498908
DOIs	https://doi.org/10.1117/12.2042195
State	Published - 2014
Externally published	Yes
Event	MOEMS and Miniaturized Systems XIII - San Francisco, CA, United States Duration: Feb 3 2014 → Feb 6 2014

Publication series

Name	Proceedings of SPIE - The International Society for Optical Engineering
Volume	8977
ISSN (Print)	0277-786X
ISSN (Electronic)	1996-756X

Conference

Conference	MOEMS and Miniaturized Systems XIII
Country/Territory	United States
City	San Francisco, CA
Period	2/3/14 → 2/6/14

All Science Journal Classification (ASJC) codes

Electronic, Optical and Magnetic Materials
Condensed Matter Physics
Computer Science Applications
Applied Mathematics
Electrical and Electronic Engineering

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10.1117/12.2042195

Cite this

@inproceedings{4ed9c34b517a46909c3912e87f970172,

title = "High speed focus control capability of electrostatic-pneumatic MEMS deformable mirrors",

abstract = "MEMS deformable mirrors are versatile elements for optical focus control. Electrostatic-pneumatic actuation of the mirrors offers relatively large membrane stroke to increase focus range. Moreover, this novel actuation method provides high speed focus control with either positive or negative focus. The speed of focusing is dependent on membrane tension, membrane size, air channel configuration, and the size of the backchamber. A 3 mm diameter mirror with 5 mm diameter actuator membrane achieves 30 kHz bandwidth with electrostatic actuation and 8 kHz bandwidth with pneumatic actuation. The settling time of the step response for both electrostatic and pneumatic actuation is approximately 100μs.",

author = "Moghimi, {Mohammad J.} and Chattergoon, {Krishna N.} and Dickensheets, {David L.}",

year = "2014",

doi = "10.1117/12.2042195",

language = "English (US)",

isbn = "9780819498908",

series = "Proceedings of SPIE - The International Society for Optical Engineering",

publisher = "SPIE",

booktitle = "MOEMS and Miniaturized Systems XIII",

address = "United States",

note = "MOEMS and Miniaturized Systems XIII ; Conference date: 03-02-2014 Through 06-02-2014",

}

Moghimi, MJ, Chattergoon, KN & Dickensheets, DL 2014, High speed focus control capability of electrostatic-pneumatic MEMS deformable mirrors. in MOEMS and Miniaturized Systems XIII., 897709, Proceedings of SPIE - The International Society for Optical Engineering, vol. 8977, SPIE, MOEMS and Miniaturized Systems XIII, San Francisco, CA, United States, 2/3/14. https://doi.org/10.1117/12.2042195

High speed focus control capability of electrostatic-pneumatic MEMS deformable mirrors. / Moghimi, Mohammad J.; Chattergoon, Krishna N.; Dickensheets, David L.
MOEMS and Miniaturized Systems XIII. SPIE, 2014. 897709 (Proceedings of SPIE - The International Society for Optical Engineering; Vol. 8977).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

TY - GEN

T1 - High speed focus control capability of electrostatic-pneumatic MEMS deformable mirrors

AU - Moghimi, Mohammad J.

AU - Chattergoon, Krishna N.

AU - Dickensheets, David L.

PY - 2014

Y1 - 2014

N2 - MEMS deformable mirrors are versatile elements for optical focus control. Electrostatic-pneumatic actuation of the mirrors offers relatively large membrane stroke to increase focus range. Moreover, this novel actuation method provides high speed focus control with either positive or negative focus. The speed of focusing is dependent on membrane tension, membrane size, air channel configuration, and the size of the backchamber. A 3 mm diameter mirror with 5 mm diameter actuator membrane achieves 30 kHz bandwidth with electrostatic actuation and 8 kHz bandwidth with pneumatic actuation. The settling time of the step response for both electrostatic and pneumatic actuation is approximately 100μs.

AB - MEMS deformable mirrors are versatile elements for optical focus control. Electrostatic-pneumatic actuation of the mirrors offers relatively large membrane stroke to increase focus range. Moreover, this novel actuation method provides high speed focus control with either positive or negative focus. The speed of focusing is dependent on membrane tension, membrane size, air channel configuration, and the size of the backchamber. A 3 mm diameter mirror with 5 mm diameter actuator membrane achieves 30 kHz bandwidth with electrostatic actuation and 8 kHz bandwidth with pneumatic actuation. The settling time of the step response for both electrostatic and pneumatic actuation is approximately 100μs.

UR - http://www.scopus.com/inward/record.url?scp=84900805363&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=84900805363&partnerID=8YFLogxK

U2 - 10.1117/12.2042195

DO - 10.1117/12.2042195

M3 - Conference contribution

AN - SCOPUS:84900805363

SN - 9780819498908

T3 - Proceedings of SPIE - The International Society for Optical Engineering

BT - MOEMS and Miniaturized Systems XIII

PB - SPIE

T2 - MOEMS and Miniaturized Systems XIII

Y2 - 3 February 2014 through 6 February 2014

ER -

High speed focus control capability of electrostatic-pneumatic MEMS deformable mirrors

Abstract

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Conference

All Science Journal Classification (ASJC) codes

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