TY - GEN
T1 - High speed focus control capability of electrostatic-pneumatic MEMS deformable mirrors
AU - Moghimi, Mohammad J.
AU - Chattergoon, Krishna N.
AU - Dickensheets, David L.
PY - 2014
Y1 - 2014
N2 - MEMS deformable mirrors are versatile elements for optical focus control. Electrostatic-pneumatic actuation of the mirrors offers relatively large membrane stroke to increase focus range. Moreover, this novel actuation method provides high speed focus control with either positive or negative focus. The speed of focusing is dependent on membrane tension, membrane size, air channel configuration, and the size of the backchamber. A 3 mm diameter mirror with 5 mm diameter actuator membrane achieves 30 kHz bandwidth with electrostatic actuation and 8 kHz bandwidth with pneumatic actuation. The settling time of the step response for both electrostatic and pneumatic actuation is approximately 100μs.
AB - MEMS deformable mirrors are versatile elements for optical focus control. Electrostatic-pneumatic actuation of the mirrors offers relatively large membrane stroke to increase focus range. Moreover, this novel actuation method provides high speed focus control with either positive or negative focus. The speed of focusing is dependent on membrane tension, membrane size, air channel configuration, and the size of the backchamber. A 3 mm diameter mirror with 5 mm diameter actuator membrane achieves 30 kHz bandwidth with electrostatic actuation and 8 kHz bandwidth with pneumatic actuation. The settling time of the step response for both electrostatic and pneumatic actuation is approximately 100μs.
UR - http://www.scopus.com/inward/record.url?scp=84900805363&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=84900805363&partnerID=8YFLogxK
U2 - 10.1117/12.2042195
DO - 10.1117/12.2042195
M3 - Conference contribution
AN - SCOPUS:84900805363
SN - 9780819498908
T3 - Proceedings of SPIE - The International Society for Optical Engineering
BT - MOEMS and Miniaturized Systems XIII
PB - SPIE
T2 - MOEMS and Miniaturized Systems XIII
Y2 - 3 February 2014 through 6 February 2014
ER -