High-resolution ¹⁹F MAS NMR spectroscopy of fluorocarbon films from pulsed PECVD of hexafluoropropylene oxide

Engineering & Materials Science

• Nuclear magnetic resonance spectroscopy 100%
• Fluorocarbons 95%
• Plasma enhanced chemical vapor deposition 93%
• Oxides 56%
• Nuclear magnetic resonance 47%
• X ray photoelectron spectroscopy 31%
• Plasmas 24%
• Plasma deposition 21%
• Thermal desorption 20%
• Ion bombardment 20%
• Film growth 20%
• Depolymerization 20%
• Oligomers 18%
• Linewidth 16%
• Thin films 12%
• Pyrolysis 12%
• Statistics 9%
• Gases 7%

Physics & Astronomy

• fluorocarbons 83%
• nuclear magnetic resonance 52%
• vapor deposition 50%
• oxides 40%
• high resolution 39%
• spectroscopy 34%
• depolymerization 15%
• cycles 14%
• permutations 13%
• oligomers 12%
• thermal decomposition 12%
• metal spinning 10%
• bombardment 10%
• fragmentation 9%
• desorption 9%
• fragments 9%
• vapor phases 8%
• statistics 8%
• solid state 8%
• shift 6%
• characterization 6%
• thin films 5%
• pulses 5%
• ions 5%

Chemical Compounds

• MAS NMR Spectroscopy 79%
• Plasma Enhanced Chemical Vapour Deposition 78%
• Fluorocarbon 76%
• Oxide 35%
• Liquid Film 31%
• Resonance 26%
• Plasma 20%
• 19F NMR Spectrum 14%
• Ion Bombardment 14%
• 19F NMR Spectroscopy 12%
• Depolymerization 12%
• Fragmentation 9%
• Oligomer 8%
• Desorption 8%
• Compound Mobility 8%
• Pyrolysis 7%
• Environment 6%