Hermetically-Encapsulated Unidirectional Accelerometer Contact Microphone for Wearable Applications

Pranav Gupta; Haoran Wen; Anosh Daruwalla; Mohammad J. Moghimi; Farrokh Ayazi

doi:10.1109/SENSORS43011.2019.8956590

Hermetically-Encapsulated Unidirectional Accelerometer Contact Microphone for Wearable Applications

Pranav Gupta
, Haoran Wen
, Anosh Daruwalla
, Mohammad J. Moghimi
, Farrokh Ayazi

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

12 Scopus citations

Abstract

We report on a novel wafer-level-packaged accelerometer contact microphone to pick up acoustic vibrations orthogonal to its contact surface without responding to airborne acoustic emissions. The design uses a high-bandwidth low-noise unidirectional capacitive accelerometer with a deformable frame suspending a proof-mass, designed to have larger displacement at the edge to allow for the implementation of shock stops. The sense electrodes use a nano-gap to provide high electrical sensitivity with high stiffness design and nano-gap damping electrodes enable near-critical damping in a low vacuum encapsulation to achieve a high bandwidth above 14 kHz. We demonstrate that the miniature accelerometer contact microphone placed on the throat can record human speech and heart sounds with high fidelity while rejecting surrounding noises.

Original language	English (US)
Title of host publication	2019 IEEE Sensors, SENSORS 2019 - Conference Proceedings
Publisher	Institute of Electrical and Electronics Engineers Inc.
ISBN (Electronic)	9781728116341
DOIs	https://doi.org/10.1109/SENSORS43011.2019.8956590
State	Published - Oct 2019
Externally published	Yes
Event	18th IEEE Sensors, SENSORS 2019 - Montreal, Canada Duration: Oct 27 2019 → Oct 30 2019

Publication series

Name	Proceedings of IEEE Sensors
Volume	2019-October
ISSN (Print)	1930-0395
ISSN (Electronic)	2168-9229

Conference

Conference	18th IEEE Sensors, SENSORS 2019
Country/Territory	Canada
City	Montreal
Period	10/27/19 → 10/30/19

All Science Journal Classification (ASJC) codes

Electrical and Electronic Engineering

Access to Document

10.1109/SENSORS43011.2019.8956590

Cite this

Gupta, P., Wen, H., Daruwalla, A., Moghimi, M. J., & Ayazi, F. (2019). Hermetically-Encapsulated Unidirectional Accelerometer Contact Microphone for Wearable Applications. In 2019 IEEE Sensors, SENSORS 2019 - Conference Proceedings Article 8956590 (Proceedings of IEEE Sensors; Vol. 2019-October). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/SENSORS43011.2019.8956590

@inproceedings{f273dde9af0b41519c5af1028f4ff820,

title = "Hermetically-Encapsulated Unidirectional Accelerometer Contact Microphone for Wearable Applications",

abstract = "We report on a novel wafer-level-packaged accelerometer contact microphone to pick up acoustic vibrations orthogonal to its contact surface without responding to airborne acoustic emissions. The design uses a high-bandwidth low-noise unidirectional capacitive accelerometer with a deformable frame suspending a proof-mass, designed to have larger displacement at the edge to allow for the implementation of shock stops. The sense electrodes use a nano-gap to provide high electrical sensitivity with high stiffness design and nano-gap damping electrodes enable near-critical damping in a low vacuum encapsulation to achieve a high bandwidth above 14 kHz. We demonstrate that the miniature accelerometer contact microphone placed on the throat can record human speech and heart sounds with high fidelity while rejecting surrounding noises.",

author = "Pranav Gupta and Haoran Wen and Anosh Daruwalla and Moghimi, \{Mohammad J.\} and Farrokh Ayazi",

note = "Publisher Copyright: {\textcopyright} 2019 IEEE.; 18th IEEE Sensors, SENSORS 2019 ; Conference date: 27-10-2019 Through 30-10-2019",

year = "2019",

month = oct,

doi = "10.1109/SENSORS43011.2019.8956590",

language = "English (US)",

series = "Proceedings of IEEE Sensors",

publisher = "Institute of Electrical and Electronics Engineers Inc.",

booktitle = "2019 IEEE Sensors, SENSORS 2019 - Conference Proceedings",

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}

Gupta, P, Wen, H, Daruwalla, A, Moghimi, MJ & Ayazi, F 2019, Hermetically-Encapsulated Unidirectional Accelerometer Contact Microphone for Wearable Applications. in 2019 IEEE Sensors, SENSORS 2019 - Conference Proceedings., 8956590, Proceedings of IEEE Sensors, vol. 2019-October, Institute of Electrical and Electronics Engineers Inc., 18th IEEE Sensors, SENSORS 2019, Montreal, Canada, 10/27/19. https://doi.org/10.1109/SENSORS43011.2019.8956590

Hermetically-Encapsulated Unidirectional Accelerometer Contact Microphone for Wearable Applications. / Gupta, Pranav; Wen, Haoran; Daruwalla, Anosh et al.
2019 IEEE Sensors, SENSORS 2019 - Conference Proceedings. Institute of Electrical and Electronics Engineers Inc., 2019. 8956590 (Proceedings of IEEE Sensors; Vol. 2019-October).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

TY - GEN

T1 - Hermetically-Encapsulated Unidirectional Accelerometer Contact Microphone for Wearable Applications

AU - Gupta, Pranav

AU - Wen, Haoran

AU - Daruwalla, Anosh

AU - Moghimi, Mohammad J.

AU - Ayazi, Farrokh

PY - 2019/10

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N2 - We report on a novel wafer-level-packaged accelerometer contact microphone to pick up acoustic vibrations orthogonal to its contact surface without responding to airborne acoustic emissions. The design uses a high-bandwidth low-noise unidirectional capacitive accelerometer with a deformable frame suspending a proof-mass, designed to have larger displacement at the edge to allow for the implementation of shock stops. The sense electrodes use a nano-gap to provide high electrical sensitivity with high stiffness design and nano-gap damping electrodes enable near-critical damping in a low vacuum encapsulation to achieve a high bandwidth above 14 kHz. We demonstrate that the miniature accelerometer contact microphone placed on the throat can record human speech and heart sounds with high fidelity while rejecting surrounding noises.

AB - We report on a novel wafer-level-packaged accelerometer contact microphone to pick up acoustic vibrations orthogonal to its contact surface without responding to airborne acoustic emissions. The design uses a high-bandwidth low-noise unidirectional capacitive accelerometer with a deformable frame suspending a proof-mass, designed to have larger displacement at the edge to allow for the implementation of shock stops. The sense electrodes use a nano-gap to provide high electrical sensitivity with high stiffness design and nano-gap damping electrodes enable near-critical damping in a low vacuum encapsulation to achieve a high bandwidth above 14 kHz. We demonstrate that the miniature accelerometer contact microphone placed on the throat can record human speech and heart sounds with high fidelity while rejecting surrounding noises.

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DO - 10.1109/SENSORS43011.2019.8956590

M3 - Conference contribution

AN - SCOPUS:85078701902

T3 - Proceedings of IEEE Sensors

BT - 2019 IEEE Sensors, SENSORS 2019 - Conference Proceedings

PB - Institute of Electrical and Electronics Engineers Inc.

T2 - 18th IEEE Sensors, SENSORS 2019

Y2 - 27 October 2019 through 30 October 2019

ER -

Hermetically-Encapsulated Unidirectional Accelerometer Contact Microphone for Wearable Applications

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All Science Journal Classification (ASJC) codes

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