TY - GEN
T1 - Electrostatic-pneumatic MEMS deformable mirror for focus control
AU - Moghimi, Mohammad J.
AU - Wilson, Chris
AU - Dickensheets, David L.
PY - 2012
Y1 - 2012
N2 - A novel actuation scheme for MEMS deformable mirrors is presented in this paper. In this method electrostatic actuation is combined with pneumatic actuation to achieve either concave or convex surface curvature and to increase the optical focus range of the mirrors. The fabricated device consists of two membranes made of the photoset epoxy SU-8. One membrane serves as the deformable mirror and the other one as the pneumatic actuator. The principle of the operation, fabrication process and deflection curves are presented.
AB - A novel actuation scheme for MEMS deformable mirrors is presented in this paper. In this method electrostatic actuation is combined with pneumatic actuation to achieve either concave or convex surface curvature and to increase the optical focus range of the mirrors. The fabricated device consists of two membranes made of the photoset epoxy SU-8. One membrane serves as the deformable mirror and the other one as the pneumatic actuator. The principle of the operation, fabrication process and deflection curves are presented.
UR - http://www.scopus.com/inward/record.url?scp=84869189923&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=84869189923&partnerID=8YFLogxK
U2 - 10.1109/OMEMS.2012.6318838
DO - 10.1109/OMEMS.2012.6318838
M3 - Conference contribution
AN - SCOPUS:84869189923
SN - 9781457715112
T3 - International Conference on Optical MEMS and Nanophotonics
SP - 132
EP - 133
BT - 2012 International Conference on Optical MEMS and Nanophotonics, OMN 2012
T2 - 2012 International Conference on Optical MEMS and Nanophotonics, OMN 2012
Y2 - 6 August 2012 through 9 August 2012
ER -