Electrostatic-pneumatic membrane mirror with positive or negative variable optical power

Mohammad J. Moghimi; David L. Dickensheets

doi:10.1109/JMEMS.2014.2346758

Electrostatic-pneumatic membrane mirror with positive or negative variable optical power

Mohammad J. Moghimi
, David L. Dickensheets

Research output: Contribution to journal › Article › peer-review

16 Scopus citations

Abstract

A microelectromechanical systems (MEMS) deformable mirror is described that uses a novel actuation scheme to increase the optical focus range. In this method, electrostatic-pneumatic actuation is used to achieve a convex surface curvature of the mirror with negative focus, while direct electrostatic actuation creates a concave surface with positive focus. Mirrors have demonstrated 20-μm total stroke with more than 2-kHz bandwidth. The fabricated device consists of two membranes made of the photoset epoxy SU-8. One membrane serves as the deformable mirror and the other one as the pneumatic actuator. The pneumatic membrane also provides a built-in valve for pressure equalization. The principle of operation, fabrication process, and results are presented.

Original language	English (US)
Article number	6887359
Pages (from-to)	716-729
Number of pages	14
Journal	Journal of Microelectromechanical Systems
Volume	24
Issue number	3
DOIs	https://doi.org/10.1109/JMEMS.2014.2346758
State	Published - Jun 1 2015
Externally published	Yes

All Science Journal Classification (ASJC) codes

Mechanical Engineering
Electrical and Electronic Engineering

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10.1109/JMEMS.2014.2346758

Cite this

@article{fa24fee5a1fb493dad0565065446e4af,

title = "Electrostatic-pneumatic membrane mirror with positive or negative variable optical power",

abstract = "A microelectromechanical systems (MEMS) deformable mirror is described that uses a novel actuation scheme to increase the optical focus range. In this method, electrostatic-pneumatic actuation is used to achieve a convex surface curvature of the mirror with negative focus, while direct electrostatic actuation creates a concave surface with positive focus. Mirrors have demonstrated 20-μm total stroke with more than 2-kHz bandwidth. The fabricated device consists of two membranes made of the photoset epoxy SU-8. One membrane serves as the deformable mirror and the other one as the pneumatic actuator. The pneumatic membrane also provides a built-in valve for pressure equalization. The principle of operation, fabrication process, and results are presented.",

author = "Moghimi, \{Mohammad J.\} and Dickensheets, \{David L.\}",

note = "Publisher Copyright: {\textcopyright} 2014 IEEE.",

year = "2015",

month = jun,

day = "1",

doi = "10.1109/JMEMS.2014.2346758",

language = "English (US)",

volume = "24",

pages = "716--729",

journal = "Journal of Microelectromechanical Systems",

issn = "1057-7157",

publisher = "Institute of Electrical and Electronics Engineers Inc.",

number = "3",

}

TY - JOUR

T1 - Electrostatic-pneumatic membrane mirror with positive or negative variable optical power

AU - Moghimi, Mohammad J.

AU - Dickensheets, David L.

PY - 2015/6/1

Y1 - 2015/6/1

N2 - A microelectromechanical systems (MEMS) deformable mirror is described that uses a novel actuation scheme to increase the optical focus range. In this method, electrostatic-pneumatic actuation is used to achieve a convex surface curvature of the mirror with negative focus, while direct electrostatic actuation creates a concave surface with positive focus. Mirrors have demonstrated 20-μm total stroke with more than 2-kHz bandwidth. The fabricated device consists of two membranes made of the photoset epoxy SU-8. One membrane serves as the deformable mirror and the other one as the pneumatic actuator. The pneumatic membrane also provides a built-in valve for pressure equalization. The principle of operation, fabrication process, and results are presented.

AB - A microelectromechanical systems (MEMS) deformable mirror is described that uses a novel actuation scheme to increase the optical focus range. In this method, electrostatic-pneumatic actuation is used to achieve a convex surface curvature of the mirror with negative focus, while direct electrostatic actuation creates a concave surface with positive focus. Mirrors have demonstrated 20-μm total stroke with more than 2-kHz bandwidth. The fabricated device consists of two membranes made of the photoset epoxy SU-8. One membrane serves as the deformable mirror and the other one as the pneumatic actuator. The pneumatic membrane also provides a built-in valve for pressure equalization. The principle of operation, fabrication process, and results are presented.

UR - https://www.scopus.com/pages/publications/85027952605

UR - https://www.scopus.com/pages/publications/85027952605#tab=citedBy

U2 - 10.1109/JMEMS.2014.2346758

DO - 10.1109/JMEMS.2014.2346758

M3 - Article

AN - SCOPUS:85027952605

SN - 1057-7157

VL - 24

SP - 716

EP - 729

JO - Journal of Microelectromechanical Systems

JF - Journal of Microelectromechanical Systems

IS - 3

M1 - 6887359

ER -

Electrostatic-pneumatic membrane mirror with positive or negative variable optical power

Abstract

All Science Journal Classification (ASJC) codes

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