TY - GEN
T1 - Electrostatic-pneumatic membrane mirror with positive or negative variable optical power
AU - Moghimi, Mohammad J.
AU - Wilson, Chris
AU - Dickensheets, David L.
PY - 2013
Y1 - 2013
N2 - A MEMS deformable mirror is described that uses a novel actuation scheme to increase the optical focus range. In this method electrostatic-pneumatic actuation is used to achieve a convex surface curvature of the mirror, while direct electrostatic actuation creates a concave surface. The fabricated device consists of two membranes made of the photoset epoxy SU-8. One membrane serves as the deformable mirror and the other one as the pneumatic actuator. The pneumatic membrane also provides a built-in valve for pressure equalization. The principle of operation, fabrication process and results are presented.
AB - A MEMS deformable mirror is described that uses a novel actuation scheme to increase the optical focus range. In this method electrostatic-pneumatic actuation is used to achieve a convex surface curvature of the mirror, while direct electrostatic actuation creates a concave surface. The fabricated device consists of two membranes made of the photoset epoxy SU-8. One membrane serves as the deformable mirror and the other one as the pneumatic actuator. The pneumatic membrane also provides a built-in valve for pressure equalization. The principle of operation, fabrication process and results are presented.
UR - http://www.scopus.com/inward/record.url?scp=84878152129&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=84878152129&partnerID=8YFLogxK
U2 - 10.1117/12.2008440
DO - 10.1117/12.2008440
M3 - Conference contribution
AN - SCOPUS:84878152129
SN - 9780819493866
T3 - Proceedings of SPIE - The International Society for Optical Engineering
BT - MEMS Adaptive Optics VII
T2 - MEMS Adaptive Optics VII
Y2 - 5 February 2013 through 7 February 2013
ER -