Electrostatic-pneumatic membrane mirror with positive or negative variable optical power

Mohammad J. Moghimi; David L. Dickensheets

doi:10.1109/JMEMS.2014.2346758

Electrostatic-pneumatic membrane mirror with positive or negative variable optical power

Mohammad J. Moghimi, David L. Dickensheets

Research output: Contribution to journal › Article › peer-review

16 Scopus citations

Abstract

A microelectromechanical systems (MEMS) deformable mirror is described that uses a novel actuation scheme to increase the optical focus range. In this method, electrostatic-pneumatic actuation is used to achieve a convex surface curvature of the mirror with negative focus, while direct electrostatic actuation creates a concave surface with positive focus. Mirrors have demonstrated 20-μm total stroke with more than 2-kHz bandwidth. The fabricated device consists of two membranes made of the photoset epoxy SU-8. One membrane serves as the deformable mirror and the other one as the pneumatic actuator. The pneumatic membrane also provides a built-in valve for pressure equalization. The principle of operation, fabrication process, and results are presented.

Original language	English (US)
Article number	6887359
Pages (from-to)	716-729
Number of pages	14
Journal	Journal of Microelectromechanical Systems
Volume	24
Issue number	3
DOIs	https://doi.org/10.1109/JMEMS.2014.2346758
State	Published - Jun 1 2015
Externally published	Yes

All Science Journal Classification (ASJC) codes

Mechanical Engineering
Electrical and Electronic Engineering

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10.1109/JMEMS.2014.2346758

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title = "Electrostatic-pneumatic membrane mirror with positive or negative variable optical power",

abstract = "A microelectromechanical systems (MEMS) deformable mirror is described that uses a novel actuation scheme to increase the optical focus range. In this method, electrostatic-pneumatic actuation is used to achieve a convex surface curvature of the mirror with negative focus, while direct electrostatic actuation creates a concave surface with positive focus. Mirrors have demonstrated 20-μm total stroke with more than 2-kHz bandwidth. The fabricated device consists of two membranes made of the photoset epoxy SU-8. One membrane serves as the deformable mirror and the other one as the pneumatic actuator. The pneumatic membrane also provides a built-in valve for pressure equalization. The principle of operation, fabrication process, and results are presented.",

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N2 - A microelectromechanical systems (MEMS) deformable mirror is described that uses a novel actuation scheme to increase the optical focus range. In this method, electrostatic-pneumatic actuation is used to achieve a convex surface curvature of the mirror with negative focus, while direct electrostatic actuation creates a concave surface with positive focus. Mirrors have demonstrated 20-μm total stroke with more than 2-kHz bandwidth. The fabricated device consists of two membranes made of the photoset epoxy SU-8. One membrane serves as the deformable mirror and the other one as the pneumatic actuator. The pneumatic membrane also provides a built-in valve for pressure equalization. The principle of operation, fabrication process, and results are presented.

AB - A microelectromechanical systems (MEMS) deformable mirror is described that uses a novel actuation scheme to increase the optical focus range. In this method, electrostatic-pneumatic actuation is used to achieve a convex surface curvature of the mirror with negative focus, while direct electrostatic actuation creates a concave surface with positive focus. Mirrors have demonstrated 20-μm total stroke with more than 2-kHz bandwidth. The fabricated device consists of two membranes made of the photoset epoxy SU-8. One membrane serves as the deformable mirror and the other one as the pneumatic actuator. The pneumatic membrane also provides a built-in valve for pressure equalization. The principle of operation, fabrication process, and results are presented.

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ER -

Electrostatic-pneumatic membrane mirror with positive or negative variable optical power

Abstract

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