Electrophoretic deposition of carbon nanotubes into device structures: An approach to integrate nanostructures into micro devices

Madhuri Guduru, Anand Francis, Tabbetha A. Dobbins

    Research output: Chapter in Book/Report/Conference proceedingConference contribution

    Abstract

    Charged particles in suspension tend to move when an electric field is applied. This simple phenomenon of migration of charged particles in a liquid medium and their subsequent deposition onto an oppositely charged electrode is called electrophoretic deposition (EPD), and is used in assembly of nanoparticles into microfabricated devices. This work reports the application of the EPD process for deposition of commercially available purified single-walled carbon nanotubes (CNT) onto microfabricated device structures. A direct current EPD in aqueous medium was used to position CNTs into two different microfabricated device structures: gold electrodes of 100nm thickness and gold microcantilevers. Control of the mass of CNTs deposited using EPD process is addressed in this work.

    Original languageEnglish (US)
    Title of host publicationFunctional Carbon Nanotubes
    PublisherMaterials Research Society
    Pages296-300
    Number of pages5
    ISBN (Print)1558998101, 9781558998100
    DOIs
    StatePublished - 2004
    Event2004 MRS Fall Meeting - Boston, MA, United States
    Duration: Nov 29 2004Dec 3 2004

    Publication series

    NameMaterials Research Society Symposium Proceedings
    Volume858
    ISSN (Print)0272-9172

    Other

    Other2004 MRS Fall Meeting
    CountryUnited States
    CityBoston, MA
    Period11/29/0412/3/04

    All Science Journal Classification (ASJC) codes

    • Materials Science(all)
    • Condensed Matter Physics
    • Mechanics of Materials
    • Mechanical Engineering

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  • Cite this

    Guduru, M., Francis, A., & Dobbins, T. A. (2004). Electrophoretic deposition of carbon nanotubes into device structures: An approach to integrate nanostructures into micro devices. In Functional Carbon Nanotubes (pp. 296-300). (Materials Research Society Symposium Proceedings; Vol. 858). Materials Research Society. https://doi.org/10.1557/proc-858-hh13.29