Electrophoretic deposition of carbon nanotubes into device structures: An approach to integrate nanostructures into micro devices

Madhuri Guduru, Anand Francis, Tabbetha A. Dobbins

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Scopus citations

Abstract

Charged particles in suspension tend to move when an electric field is applied. This simple phenomenon of migration of charged particles in a liquid medium and their subsequent deposition onto an oppositely charged electrode is called electrophoretic deposition (EPD), and is used in assembly of nanoparticles into microfabricated devices. This work reports the application of the EPD process for deposition of commercially available purified single-walled carbon nanotubes (CNT) onto microfabricated device structures. A direct current EPD in aqueous medium was used to position CNTs into two different microfabricated device structures: gold electrodes of 100nm thickness and gold microcantilevers. Control of the mass of CNTs deposited using EPD process is addressed in this work.

Original languageEnglish (US)
Title of host publicationFunctional Carbon Nanotubes
PublisherMaterials Research Society
Pages296-300
Number of pages5
ISBN (Print)1558998101, 9781558998100
DOIs
StatePublished - 2004
Externally publishedYes
Event2004 MRS Fall Meeting - Boston, MA, United States
Duration: Nov 29 2004Dec 3 2004

Publication series

NameMaterials Research Society Symposium Proceedings
Volume858
ISSN (Print)0272-9172

Other

Other2004 MRS Fall Meeting
Country/TerritoryUnited States
CityBoston, MA
Period11/29/0412/3/04

All Science Journal Classification (ASJC) codes

  • General Materials Science
  • Condensed Matter Physics
  • Mechanics of Materials
  • Mechanical Engineering

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