TY - JOUR
T1 - Electrochromic properties and performance of NiO x films and their corresponding all-thin-film flexible devices preparedby reactive DC magnetron sputtering
AU - Dong, Dongmei
AU - Wang, Wenwen
AU - Dong, Guobo
AU - Zhang, Fan
AU - He, Yingchun
AU - Yu, Hang
AU - Liu, Famin
AU - Wang, Mei
AU - Diao, Xungang
N1 - Publisher Copyright:
© 2016 Elsevier B.V. All rights reserved.
PY - 2016/10/15
Y1 - 2016/10/15
N2 - Nickel oxide (NiO x ) thin films were deposited by direct current magnetron sputtering technique onto flexible substrates with various oxygen (O 2 ) partial pressures. The influence of O 2 contents during deposition process on film structure, morphology, composition, optical and electrochromic (EC) characteristics of the films were investigated. The EC response for nonstoichiometric NiO x films shows a strong dependence on grain size variations and surface morphology. Finally, the multiple-layer stacks ITO/NiO x /Ta 2 O 5 :H/WO 3 /ITO were sequentially vacuum deposited over flexible polyethylene terephthalate plates based on the optimization of NiO x single layers. A large optical contrast up to 60% and a good durability are obtained for full device. To perform preliminary research on the mechanical properties within flexible devices, we introduced nontrivial changes to the interfacial properties by replacing the glass with flexible polymers. The effects were studied through static bending and the nano-scratch test.
AB - Nickel oxide (NiO x ) thin films were deposited by direct current magnetron sputtering technique onto flexible substrates with various oxygen (O 2 ) partial pressures. The influence of O 2 contents during deposition process on film structure, morphology, composition, optical and electrochromic (EC) characteristics of the films were investigated. The EC response for nonstoichiometric NiO x films shows a strong dependence on grain size variations and surface morphology. Finally, the multiple-layer stacks ITO/NiO x /Ta 2 O 5 :H/WO 3 /ITO were sequentially vacuum deposited over flexible polyethylene terephthalate plates based on the optimization of NiO x single layers. A large optical contrast up to 60% and a good durability are obtained for full device. To perform preliminary research on the mechanical properties within flexible devices, we introduced nontrivial changes to the interfacial properties by replacing the glass with flexible polymers. The effects were studied through static bending and the nano-scratch test.
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U2 - 10.1016/j.apsusc.2016.04.154
DO - 10.1016/j.apsusc.2016.04.154
M3 - Article
AN - SCOPUS:84965102421
SN - 0169-4332
VL - 383
SP - 49
EP - 56
JO - Applied Surface Science
JF - Applied Surface Science
ER -