Deposition of micrometer-scale tungsten, molybdenum and platinum lines with the aid of the uv light from an argon-ion laser was investigated. Tungsten and molybdenum were deposited from their corresponding carbonyls and platinum from an acetylacetonate compound. High-quality metal conductors could be achieved for tungsten and platinum using a combined photolytic and pyrolytic, or "hybrid", deposition scheme. The resistivity for these two deposited metals was approximately twice the bulk value. For molybdenum the deposition process was fast and dominated by the pyrolysis; the corresponding line resistivity was slightly higher than for the two other metals.
|Original language||English (US)|
|Number of pages||12|
|Journal||Applied Physics B Photophysics and Laser Chemistry|
|State||Published - Feb 1 1987|
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