Direct writing of metal conductors with near-uv light

H. H. Gilgen, T. Cacouris, P. S. Shaw, R. R. Krchnavek, R. M. Osgood

Research output: Contribution to journalArticlepeer-review

67 Scopus citations

Abstract

Deposition of micrometer-scale tungsten, molybdenum and platinum lines with the aid of the uv light from an argon-ion laser was investigated. Tungsten and molybdenum were deposited from their corresponding carbonyls and platinum from an acetylacetonate compound. High-quality metal conductors could be achieved for tungsten and platinum using a combined photolytic and pyrolytic, or "hybrid", deposition scheme. The resistivity for these two deposited metals was approximately twice the bulk value. For molybdenum the deposition process was fast and dominated by the pyrolysis; the corresponding line resistivity was slightly higher than for the two other metals.

Original languageEnglish (US)
Pages (from-to)55-66
Number of pages12
JournalApplied Physics B Photophysics and Laser Chemistry
Volume42
Issue number2
DOIs
StatePublished - Feb 1 1987
Externally publishedYes

All Science Journal Classification (ASJC) codes

  • Engineering(all)

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