Design optimization for a non-resonant mems gyroscope

Wei Cui, Chen Xiaolin, Wei Xue

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Scopus citations

Abstract

Conventional capacitive MEMS gyroscopes require close matching between the resonant frequencies of drive mode and sense mode. However, the uncertainties in the microfabrication process impair the robustness of the gyroscopes and often lead to unpredictable device performance. This paper analyzes a 4 degree-of-freedom (DOF) non-resonant gyroscope which is less vulnerable to the fabrication perturbations. Unlike the conventional resonant gyroscope which has only one resonant frequency for drive and sense modes, the 4-DOF gyroscope includes two resonant frequencies for each mode. The non-resonant gyroscope design aims to reduce resonance frequency matching, namely to minimize the effect of the inevitable fabrication uncertainties as well as to increase the bandwidth with less sacrifice to the sensitivity. The device performance is analyzed and optimized by the behavior model approach in CovcntorWare which significantly accelerates the simulation compared to the traditional finite element method. The optimized non-resonant gyroscope with higher fabrication tolerance as well as enhanced device performance is proven to be an effective design and can be used in a wide range of applications.

Original languageEnglish (US)
Title of host publicationProceedings of the ASME International Mechanical Engineering Congress and Exposition 2009, IMECE 2009
PublisherAmerican Society of Mechanical Engineers (ASME)
Pages427-432
Number of pages6
Volume12
EditionPART A
ISBN (Print)9780791843857
DOIs
Publication statusPublished - Jan 1 2010
Externally publishedYes
EventASME 2009 International Mechanical Engineering Congress and Exposition, IMECE2009 - Lake Buena Vista, FL, United States
Duration: Nov 13 2009Nov 19 2009

Other

OtherASME 2009 International Mechanical Engineering Congress and Exposition, IMECE2009
CountryUnited States
CityLake Buena Vista, FL
Period11/13/0911/19/09

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All Science Journal Classification (ASJC) codes

  • Mechanical Engineering

Cite this

Cui, W., Xiaolin, C., & Xue, W. (2010). Design optimization for a non-resonant mems gyroscope. In Proceedings of the ASME International Mechanical Engineering Congress and Exposition 2009, IMECE 2009 (PART A ed., Vol. 12, pp. 427-432). American Society of Mechanical Engineers (ASME). https://doi.org/10.1115/IMECE2009-10812