TY - GEN
T1 - Deformable mirror with controlled air damping for fast focus tracking and scanning
AU - Moghimi, Mohammad J.
AU - Chattergoon, Krishna
AU - Wilson, Chris
AU - Dickensheets, David L.
PY - 2012
Y1 - 2012
N2 - Air flow is the dominant damping mechanism for deformable membrane mirrors that are actuated with electrostatic pressure from a counter electrode in close proximity to the flexible membrane. We use cryogenic deep silicon etching to create through-wafer perforations in the backplate in order to control air damping and achieve high-speed focus control. This paper describes both our design approach and device fabrication details. We show that damping can be controlled by selecting the proper hole pattern, and we present experimental and simulated frequency response measurements for small membrane displacements. Also we measured the 95% settling time of a 4 mm diameter mirror subjected to a 10 μm step deflection to be less than 200 μs.
AB - Air flow is the dominant damping mechanism for deformable membrane mirrors that are actuated with electrostatic pressure from a counter electrode in close proximity to the flexible membrane. We use cryogenic deep silicon etching to create through-wafer perforations in the backplate in order to control air damping and achieve high-speed focus control. This paper describes both our design approach and device fabrication details. We show that damping can be controlled by selecting the proper hole pattern, and we present experimental and simulated frequency response measurements for small membrane displacements. Also we measured the 95% settling time of a 4 mm diameter mirror subjected to a 10 μm step deflection to be less than 200 μs.
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U2 - 10.1117/12.910977
DO - 10.1117/12.910977
M3 - Conference contribution
AN - SCOPUS:84859095533
SN - 9780819488954
T3 - Proceedings of SPIE - The International Society for Optical Engineering
BT - MOEMS and Miniaturized Systems XI
T2 - MOEMS and Miniaturized Systems XI
Y2 - 24 January 2012 through 25 January 2012
ER -