Carbon nanotube micropatterns and cantilever arrays fabricated with layer-by-layer nano self-assembly

Wei Xue, Tianhong Cui

Research output: Contribution to journalArticlepeer-review

24 Scopus citations


The two-dimensional (2D) microstructures and three-dimensional (3D) cantilever arrays based on single-walled carbon nanotube (SWNT) multilayer were fabricated by combining electrostatic layer-by-layer (LbL) nano self-assembly, microlithography, and lift-off. The combinative technique provides a simple, effective, low-cost, and low-temperature fabrication method with a short processing time. The 2D SWNT micropatterns with a feature size of 5 μm were fabricated and characterized. The thickness of a (PDDA/SWNT) bi-layer was measured approximately as 76 Å. SWNTs were randomly deposited on the substrate, and they were interconnected and formed as a dense network. To investigate the potential applications of SWNTs, magnetic cantilever arrays formed with SWNTs, iron oxide (Fe2O3) nanoparticles, and polyelectrolytes were developed. A modified lift-off process was developed to provide additional protection for the cantilever arrays. Due to the outstanding mechanical properties of the SWNTs, the fabricated cantilevers are very strong and highly flexible. The cantilever arrays can be used in applications such as biosensors and microvalves.

Original languageEnglish (US)
Pages (from-to)510-517
Number of pages8
JournalSensors and Actuators, A: Physical
Issue number2
StatePublished - May 1 2007
Externally publishedYes

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Instrumentation
  • Condensed Matter Physics
  • Surfaces, Coatings and Films
  • Metals and Alloys
  • Electrical and Electronic Engineering


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