Abstract
Single-mode optical waveguides at 1300 nm have been fabricated from the organic polymer benzocyclobutene. This material system utilizes a 535 rmb photodefinable resin for forming the core of the waveguide, allowing the waveguides to be processed in a fashion similar to a negative photoresist. The processing conditions required for the fabrication of single-mode benzocyclobutene optical waveguides are presented. With the measured losses in the waveguide equal to.81 dB/cm at 1300 nm, this material system is suitable for use in a variety of optical interconnect applications.
| Original language | English (US) |
|---|---|
| Pages (from-to) | 535-537 |
| Number of pages | 3 |
| Journal | IEEE Photonics Technology Letters |
| Volume | 7 |
| Issue number | 5 |
| DOIs | |
| State | Published - May 1995 |
| Externally published | Yes |
All Science Journal Classification (ASJC) codes
- Electronic, Optical and Magnetic Materials
- Atomic and Molecular Physics, and Optics
- Electrical and Electronic Engineering
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