Single-mode optical waveguides at 1300 nm have been fabricated from the organic polymer benzocyclobutene. This material system utilizes a 535 rmb photodefinable resin for forming the core of the waveguide, allowing the waveguides to be processed in a fashion similar to a negative photoresist. The processing conditions required for the fabrication of single-mode benzocyclobutene optical waveguides are presented. With the measured losses in the waveguide equal to.81 dB/cm at 1300 nm, this material system is suitable for use in a variety of optical interconnect applications.
All Science Journal Classification (ASJC) codes
- Electronic, Optical and Magnetic Materials
- Atomic and Molecular Physics, and Optics
- Electrical and Electronic Engineering