Benzocyclobutene Optical Waveguides

Casey F. Kane, Robert R. Krchnavek

Research output: Contribution to journalArticlepeer-review

120 Scopus citations

Abstract

Single-mode optical waveguides at 1300 nm have been fabricated from the organic polymer benzocyclobutene. This material system utilizes a 535 rmb photodefinable resin for forming the core of the waveguide, allowing the waveguides to be processed in a fashion similar to a negative photoresist. The processing conditions required for the fabrication of single-mode benzocyclobutene optical waveguides are presented. With the measured losses in the waveguide equal to.81 dB/cm at 1300 nm, this material system is suitable for use in a variety of optical interconnect applications.

Original languageEnglish (US)
Pages (from-to)535-537
Number of pages3
JournalIEEE Photonics Technology Letters
Volume7
Issue number5
DOIs
StatePublished - May 1995
Externally publishedYes

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Atomic and Molecular Physics, and Optics
  • Electrical and Electronic Engineering

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