Angular magnetic field dependence of a doubly clamped magnetoelectric resonator

Thomas Mion, Benjamin M. Lefler, Margo Staruch, Steven Bennett, Norman Gottron, Samuel E. Lofland, Konrad Bussmann, Nicholas Gangemi, Jeffrey Baldwin, Peter Finkel

Research output: Contribution to journalArticlepeer-review


Angular dependence of magnetic field response of fully suspended resonant microelectromechanical double-clamped magnetoelectric beams was investigated as the basis for a vector magnetometer utilizing the magnetically induced change in fundamental resonance frequency. Strain-coupled magnetostrictive iron cobalt (FeCo) and piezoelectric aluminum nitride layers together constitute a magnetoelectric heterostructure with a high magnetic field sensitivity of 70 Hz/mT along the beam axis and a transfer function of 47 V/T at 10 Hz. The fundamental frequency shift to an external magnetic field is found to be strongly anisotropic with a relative variation of more than 3% between perpendicular and parallel field orientations with respect to the long axis of the beam at a field of 100 mT. This design can form the basis for an on-chip high sensitivity vector magnetometer operating with ultra-low power when multiplexed with two or more resonators.

Original languageEnglish (US)
Article number062901
JournalApplied Physics Letters
Issue number6
StatePublished - Aug 7 2023

All Science Journal Classification (ASJC) codes

  • Physics and Astronomy (miscellaneous)


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