Abstract
We report on the synthesis and physical properties of epitaxial Cr-substituted vanadium carbide (V1-xCrx)2C thin films deposited on c-axis sapphire by magnetron sputtering using a co-deposition technique. Solid solutions were found to form up to x ≈ 0.5 over a wide range of deposition temperatures. In general, it was found that surface roughness is dependent on the degree of crystallinity as well as the deposition temperature. However, the surface friction was remarkably low, as long as the surface roughness remained below a critical value of about 2 nm. Even for relatively small amounts of Cr (x ∼ 0.1), there was significantly enhanced corrosion resistance over that of V2C.
| Original language | English (US) |
|---|---|
| Pages (from-to) | 212-215 |
| Number of pages | 4 |
| Journal | Vacuum |
| Volume | 109 |
| DOIs | |
| State | Published - Nov 2014 |
All Science Journal Classification (ASJC) codes
- Instrumentation
- Condensed Matter Physics
- Surfaces, Coatings and Films