TY - GEN
T1 - An improved focus control mirror using SU-8 wafer bonding process
AU - Moghimi, Mohammad J.
AU - Lutzenberger, B. Jeffery
AU - Oliver, Kyle
AU - Gates, Steven
AU - Xue, Xiaohu
AU - Kaylor, Brant
AU - Dickensheets, Dvid L.
PY - 2011
Y1 - 2011
N2 - We are developing MEMS deformable mirrors for focus control in miniature optical systems, including endoscopic microscopes and small form-factor camera lenses. This paper describes a new process to create mirrors made from the photoset polymer SU-8. The SU-8 also serves as the adhesive layer for wafer bonding, resulting in a simple, low cost fabrication process. The paper describes the process details and the optical properties of the resulting focus control mirrors, which have a diameter of 2 mm, a stroke in excess of 8 μm and very low residual aberration. Multiple actuation electrodes allow control of more than 0.4 μm peak-peak of spherical aberration.
AB - We are developing MEMS deformable mirrors for focus control in miniature optical systems, including endoscopic microscopes and small form-factor camera lenses. This paper describes a new process to create mirrors made from the photoset polymer SU-8. The SU-8 also serves as the adhesive layer for wafer bonding, resulting in a simple, low cost fabrication process. The paper describes the process details and the optical properties of the resulting focus control mirrors, which have a diameter of 2 mm, a stroke in excess of 8 μm and very low residual aberration. Multiple actuation electrodes allow control of more than 0.4 μm peak-peak of spherical aberration.
UR - https://www.scopus.com/pages/publications/79953667964
UR - https://www.scopus.com/pages/publications/79953667964#tab=citedBy
U2 - 10.1117/12.876672
DO - 10.1117/12.876672
M3 - Conference contribution
AN - SCOPUS:79953667964
SN - 9780819484673
T3 - Proceedings of SPIE - The International Society for Optical Engineering
BT - MOEMS and Miniaturized Systems X
T2 - MOEMS and Miniaturized Systems X
Y2 - 24 January 2011 through 26 January 2011
ER -