An improved focus control mirror using SU-8 wafer bonding process

Mohammad J. Moghimi; B. Jeffery Lutzenberger; Kyle Oliver; Steven Gates; Xiaohu Xue; Brant Kaylor; Dvid L. Dickensheets

doi:10.1117/12.876672

An improved focus control mirror using SU-8 wafer bonding process

Mohammad J. Moghimi, B. Jeffery Lutzenberger, Kyle Oliver, Steven Gates, Xiaohu Xue, Brant Kaylor, Dvid L. Dickensheets

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

4 Scopus citations

Abstract

We are developing MEMS deformable mirrors for focus control in miniature optical systems, including endoscopic microscopes and small form-factor camera lenses. This paper describes a new process to create mirrors made from the photoset polymer SU-8. The SU-8 also serves as the adhesive layer for wafer bonding, resulting in a simple, low cost fabrication process. The paper describes the process details and the optical properties of the resulting focus control mirrors, which have a diameter of 2 mm, a stroke in excess of 8 μm and very low residual aberration. Multiple actuation electrodes allow control of more than 0.4 μm peak-peak of spherical aberration.

Original language	English (US)
Title of host publication	MOEMS and Miniaturized Systems X
DOIs	https://doi.org/10.1117/12.876672
State	Published - 2011
Externally published	Yes
Event	MOEMS and Miniaturized Systems X - San Francisco, CA, United States Duration: Jan 24 2011 → Jan 26 2011

Publication series

Name	Proceedings of SPIE - The International Society for Optical Engineering
Volume	7930
ISSN (Print)	0277-786X

Conference

Conference	MOEMS and Miniaturized Systems X
Country/Territory	United States
City	San Francisco, CA
Period	1/24/11 → 1/26/11

All Science Journal Classification (ASJC) codes

Electronic, Optical and Magnetic Materials
Condensed Matter Physics
Computer Science Applications
Applied Mathematics
Electrical and Electronic Engineering

Access to Document

10.1117/12.876672

Cite this

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title = "An improved focus control mirror using SU-8 wafer bonding process",

abstract = "We are developing MEMS deformable mirrors for focus control in miniature optical systems, including endoscopic microscopes and small form-factor camera lenses. This paper describes a new process to create mirrors made from the photoset polymer SU-8. The SU-8 also serves as the adhesive layer for wafer bonding, resulting in a simple, low cost fabrication process. The paper describes the process details and the optical properties of the resulting focus control mirrors, which have a diameter of 2 mm, a stroke in excess of 8 μm and very low residual aberration. Multiple actuation electrodes allow control of more than 0.4 μm peak-peak of spherical aberration.",

author = "Moghimi, {Mohammad J.} and Lutzenberger, {B. Jeffery} and Kyle Oliver and Steven Gates and Xiaohu Xue and Brant Kaylor and Dickensheets, {Dvid L.}",

year = "2011",

doi = "10.1117/12.876672",

language = "English (US)",

isbn = "9780819484673",

series = "Proceedings of SPIE - The International Society for Optical Engineering",

booktitle = "MOEMS and Miniaturized Systems X",

note = "MOEMS and Miniaturized Systems X ; Conference date: 24-01-2011 Through 26-01-2011",

}

Moghimi, MJ, Lutzenberger, BJ, Oliver, K, Gates, S, Xue, X, Kaylor, B & Dickensheets, DL 2011, An improved focus control mirror using SU-8 wafer bonding process. in MOEMS and Miniaturized Systems X., 793005, Proceedings of SPIE - The International Society for Optical Engineering, vol. 7930, MOEMS and Miniaturized Systems X, San Francisco, CA, United States, 1/24/11. https://doi.org/10.1117/12.876672

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AU - Moghimi, Mohammad J.

AU - Lutzenberger, B. Jeffery

AU - Oliver, Kyle

AU - Gates, Steven

AU - Xue, Xiaohu

AU - Kaylor, Brant

AU - Dickensheets, Dvid L.

PY - 2011

Y1 - 2011

N2 - We are developing MEMS deformable mirrors for focus control in miniature optical systems, including endoscopic microscopes and small form-factor camera lenses. This paper describes a new process to create mirrors made from the photoset polymer SU-8. The SU-8 also serves as the adhesive layer for wafer bonding, resulting in a simple, low cost fabrication process. The paper describes the process details and the optical properties of the resulting focus control mirrors, which have a diameter of 2 mm, a stroke in excess of 8 μm and very low residual aberration. Multiple actuation electrodes allow control of more than 0.4 μm peak-peak of spherical aberration.

AB - We are developing MEMS deformable mirrors for focus control in miniature optical systems, including endoscopic microscopes and small form-factor camera lenses. This paper describes a new process to create mirrors made from the photoset polymer SU-8. The SU-8 also serves as the adhesive layer for wafer bonding, resulting in a simple, low cost fabrication process. The paper describes the process details and the optical properties of the resulting focus control mirrors, which have a diameter of 2 mm, a stroke in excess of 8 μm and very low residual aberration. Multiple actuation electrodes allow control of more than 0.4 μm peak-peak of spherical aberration.

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T3 - Proceedings of SPIE - The International Society for Optical Engineering

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ER -

An improved focus control mirror using SU-8 wafer bonding process

Abstract

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Conference

All Science Journal Classification (ASJC) codes

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