Abstract
The stringent requirements for the preparation of high Tc superconducting thin films, based on the demands for device fabrication, pose a major challenge to the number of thin film deposition and processing techniques. In this paper we examine the generic problems of the various techniques and expand on the capabilities of a pulsed laser deposition process. We show that using suitable processing steps the laser deposition technique for preparation of high-Tc thin films is emerging as a strong contender among the various thin film deposition techniques.
Original language | English (US) |
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Pages (from-to) | 234-264 |
Number of pages | 31 |
Journal | ACS Symposium Series |
Issue number | 377 |
State | Published - 1988 |
Externally published | Yes |
Event | Chemistry of High-Temperature Superconductors II - Los Angeles, CA, USA Duration: Sep 25 1988 → Sep 30 1988 |
All Science Journal Classification (ASJC) codes
- General Chemistry
- General Chemical Engineering