Advances in processing high-temperature superconducting thin films with lasers

T. Venkatesan, X. D. Wu, A. Inam, M. S. Hedge, E. W. Chase, C. C. Chang, P. England, D. M. Hwang, R. Krchnavek, J. B. Wachtman, W. L. McLean, R. Levi-Setti, J. Chabala, Y. L. Wang

Research output: Contribution to journalConference articlepeer-review

3 Scopus citations

Abstract

The stringent requirements for the preparation of high Tc superconducting thin films, based on the demands for device fabrication, pose a major challenge to the number of thin film deposition and processing techniques. In this paper we examine the generic problems of the various techniques and expand on the capabilities of a pulsed laser deposition process. We show that using suitable processing steps the laser deposition technique for preparation of high-Tc thin films is emerging as a strong contender among the various thin film deposition techniques.

Original languageEnglish (US)
Pages (from-to)234-264
Number of pages31
JournalACS Symposium Series
Issue number377
StatePublished - 1988
Externally publishedYes
EventChemistry of High-Temperature Superconductors II - Los Angeles, CA, USA
Duration: Sep 25 1988Sep 30 1988

All Science Journal Classification (ASJC) codes

  • General Chemistry
  • General Chemical Engineering

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