TY - GEN
T1 - A preliminary study on machinability of polymethylmethacrylate (PMMA)/multi-walled carbon nanotube (MWCNT) nanocomposites in focused ion beam micromachining
AU - Li, Pengfei
AU - Xue, Wei
AU - Kim, Dave
AU - Park, Young Bin
PY - 2011/12/5
Y1 - 2011/12/5
N2 - This experimental study investigated the machinability of polymethylmethacrylate (PMMA)/multi-walled carbon nanotube (MWCNT) nanocomposites with 20 wt% MWCNTs in focused ion beam (FIB) micromachining. PMMA/MWCNT nanocomposites were fabricated using a solution casting method, in which PMMA and MWCNTs were dispersed in a solvent by ultrasonication. Microscale rectangular pockets were created on the PMMA/MWCNT nanocomposites to study the material removal mechanism in FIB. Effects of FIB input current and the ion beam overlap parameter (overlap %) on the material removal rate and geometric accuracy were studied. It was observed that the material removal rate increased with increasing input current and decreasing overlap %. Soft lithography was used to translate the ion-milled pockets on PMMA/MWCNT nanocomposites into microscale posts on polydimethylsiloxane (PDMS) for accurate measurement of the pocket geometries. A Scanning Electron Microscope (SEM) was used to investigate the characteristics of the micromachined features, nanocomposite surfaces, and replicated PDMS patterns. Our results demonstrated an effective method to produce microscale patterns on MWCNTbased nanocomposites.
AB - This experimental study investigated the machinability of polymethylmethacrylate (PMMA)/multi-walled carbon nanotube (MWCNT) nanocomposites with 20 wt% MWCNTs in focused ion beam (FIB) micromachining. PMMA/MWCNT nanocomposites were fabricated using a solution casting method, in which PMMA and MWCNTs were dispersed in a solvent by ultrasonication. Microscale rectangular pockets were created on the PMMA/MWCNT nanocomposites to study the material removal mechanism in FIB. Effects of FIB input current and the ion beam overlap parameter (overlap %) on the material removal rate and geometric accuracy were studied. It was observed that the material removal rate increased with increasing input current and decreasing overlap %. Soft lithography was used to translate the ion-milled pockets on PMMA/MWCNT nanocomposites into microscale posts on polydimethylsiloxane (PDMS) for accurate measurement of the pocket geometries. A Scanning Electron Microscope (SEM) was used to investigate the characteristics of the micromachined features, nanocomposite surfaces, and replicated PDMS patterns. Our results demonstrated an effective method to produce microscale patterns on MWCNTbased nanocomposites.
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U2 - 10.1115/MSEC2011-50115
DO - 10.1115/MSEC2011-50115
M3 - Conference contribution
AN - SCOPUS:82455205643
SN - 9780791844311
T3 - ASME 2011 International Manufacturing Science and Engineering Conference, MSEC 2011
SP - 515
EP - 523
BT - ASME 2011 International Manufacturing Science and Engineering Conference, MSEC 2011
T2 - ASME 2011 International Manufacturing Science and Engineering Conference, MSEC 2011
Y2 - 13 June 2011 through 17 June 2011
ER -