A design-oriented experimental module for teaching micro- and nanotechnologies to mechanical engineering students

Advances in miniaturization science have provided new opportunities in education at both the undergraduate and graduate levels. In order to effectively incorporate micro- and nanotechnologies into the existing mechanical engineering curriculum, the author developed a design-oriented experimental module for two laboratory-intensive courses. Students enrolled on these courses are involved in all the stages of the laboratory projects: design, fabrication, and measurement. The experimental module emphasizes hands-on experience and is seamlessly integrated into the course structures. The students can use what they learn from the classes in the laboratory activities, which include two-dimensional photomask layout design, photolithography, isotropic and anisotropic wet etching, bulk micromachining, and thin-fi lm and structure characterization with various measurement tools. Each laboratory activity is designed to integrate theories from textbooks with actual fabrication and characterization processes. The students gain a better understanding of the course topics by creating their own designs that meet the requirements and by fabricating their own structures that show satisfactory results. According to student surveys the experimental module is effective in teaching micro- and nanotechnologies in the mechanical engineering program. With some modifi cation, this module can be easily extended to courses in other disciplines.