A deformable mirror with perforated backplate for high-speed operation with controlled damping

Mohammad J. Moghimi; Krishna N. Chattergoon; Matthew J. Strathman; Chris Wilson; David L. Dickensheets

doi:10.1109/OMEMS.2011.6031048

A deformable mirror with perforated backplate for high-speed operation with controlled damping

Mohammad J. Moghimi, Krishna N. Chattergoon, Matthew J. Strathman, Chris Wilson, David L. Dickensheets

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

1 Scopus citations

Abstract

Cryogenic deep silicon etching creates through-wafer perforations in the backplate of a MEMS deformable mirror in order to control air damping and achieve wide-bandwidth actuation. Design approach, fabrication and characterization are shown.

Original language	English (US)
Title of host publication	Proceedings - OMN2011
Subtitle of host publication	16th International Conference on Optical MEMS and Nanophotonics
Pages	149-150
Number of pages	2
DOIs	https://doi.org/10.1109/OMEMS.2011.6031048
State	Published - 2011
Externally published	Yes
Event	16th International Conference on Optical MEMS and Nanophotonics, OMN2011 - Istanbul, Turkey Duration: Aug 8 2011 → Aug 11 2011

Publication series

Name	International Conference on Optical MEMS and Nanophotonics
ISSN (Print)	2160-5033
ISSN (Electronic)	2160-5041

Conference

Conference	16th International Conference on Optical MEMS and Nanophotonics, OMN2011
Country/Territory	Turkey
City	Istanbul
Period	8/8/11 → 8/11/11

All Science Journal Classification (ASJC) codes

Hardware and Architecture
Electrical and Electronic Engineering
Electronic, Optical and Magnetic Materials

Access to Document

10.1109/OMEMS.2011.6031048

Cite this

Moghimi, M. J., Chattergoon, K. N., Strathman, M. J., Wilson, C., & Dickensheets, D. L. (2011). A deformable mirror with perforated backplate for high-speed operation with controlled damping. In Proceedings - OMN2011: 16th International Conference on Optical MEMS and Nanophotonics (pp. 149-150). Article 6031048 (International Conference on Optical MEMS and Nanophotonics). https://doi.org/10.1109/OMEMS.2011.6031048

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title = "A deformable mirror with perforated backplate for high-speed operation with controlled damping",

abstract = "Cryogenic deep silicon etching creates through-wafer perforations in the backplate of a MEMS deformable mirror in order to control air damping and achieve wide-bandwidth actuation. Design approach, fabrication and characterization are shown.",

author = "Moghimi, {Mohammad J.} and Chattergoon, {Krishna N.} and Strathman, {Matthew J.} and Chris Wilson and Dickensheets, {David L.}",

year = "2011",

doi = "10.1109/OMEMS.2011.6031048",

language = "English (US)",

isbn = "9781457703362",

series = "International Conference on Optical MEMS and Nanophotonics",

pages = "149--150",

booktitle = "Proceedings - OMN2011",

note = "16th International Conference on Optical MEMS and Nanophotonics, OMN2011 ; Conference date: 08-08-2011 Through 11-08-2011",

}

Moghimi, MJ, Chattergoon, KN, Strathman, MJ, Wilson, C & Dickensheets, DL 2011, A deformable mirror with perforated backplate for high-speed operation with controlled damping. in Proceedings - OMN2011: 16th International Conference on Optical MEMS and Nanophotonics., 6031048, International Conference on Optical MEMS and Nanophotonics, pp. 149-150, 16th International Conference on Optical MEMS and Nanophotonics, OMN2011, Istanbul, Turkey, 8/8/11. https://doi.org/10.1109/OMEMS.2011.6031048

A deformable mirror with perforated backplate for high-speed operation with controlled damping. / Moghimi, Mohammad J.; Chattergoon, Krishna N.; Strathman, Matthew J. et al.
Proceedings - OMN2011: 16th International Conference on Optical MEMS and Nanophotonics. 2011. p. 149-150 6031048 (International Conference on Optical MEMS and Nanophotonics).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

TY - GEN

T1 - A deformable mirror with perforated backplate for high-speed operation with controlled damping

AU - Moghimi, Mohammad J.

AU - Chattergoon, Krishna N.

AU - Strathman, Matthew J.

AU - Wilson, Chris

AU - Dickensheets, David L.

PY - 2011

Y1 - 2011

N2 - Cryogenic deep silicon etching creates through-wafer perforations in the backplate of a MEMS deformable mirror in order to control air damping and achieve wide-bandwidth actuation. Design approach, fabrication and characterization are shown.

AB - Cryogenic deep silicon etching creates through-wafer perforations in the backplate of a MEMS deformable mirror in order to control air damping and achieve wide-bandwidth actuation. Design approach, fabrication and characterization are shown.

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M3 - Conference contribution

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T3 - International Conference on Optical MEMS and Nanophotonics

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BT - Proceedings - OMN2011

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Y2 - 8 August 2011 through 11 August 2011

ER -

Moghimi MJ, Chattergoon KN, Strathman MJ, Wilson C, Dickensheets DL. A deformable mirror with perforated backplate for high-speed operation with controlled damping. In Proceedings - OMN2011: 16th International Conference on Optical MEMS and Nanophotonics. 2011. p. 149-150. 6031048. (International Conference on Optical MEMS and Nanophotonics). doi: 10.1109/OMEMS.2011.6031048

A deformable mirror with perforated backplate for high-speed operation with controlled damping

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Publication series

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All Science Journal Classification (ASJC) codes

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